Mega-Bit Memory Technology - From Mega-Bit to Giga-Bit

From Mega-Bit to Giga-Bit

By: Hiroyuki Tango (Editor)

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eText | 16 October 2019 | Edition Number 1

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This book describes LSI process technology, and focuses on the rapid progress of state-of-the-art dynamic random access memory (DRAM) process technologies—the longstanding technology driver of Si ULSI—as they advance from the 1 Kbit to the Gbit DRAM era.