Information Technology

Transmission, Processing & Storage

By: Robert W. Johnstone, Ash Parmaswaran

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Hardcover | 3 June 2004

At a Glance

Hardcover
208 Pages

Dimensions(cm)
24.13 x 16.51 x 1.91

Hardcover

$169.00

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An Introduction to Surface-Micromachining provides for the first time a unified view of surface-micromachining. Building up from the basic building block of microfabrication techniques, to the general surface-micromachining design, it will finish with the theory and design of concrete components. An Introduction to Surface-Micromachining connects the manufacturing process, microscale phenomena, and design data to physical form and function.
This book will be of interest to mechanical engineers looking to scale down into micromachining and microelectronics designers looking to move horizontally to micromachining.

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You Can Find This Book In

Non-Fiction Engineering & Technology Mechanical Engineering & Materials Materials Science Mechanical Engineering Industrial Chemistry & Manufacturing Technologies Energy Technology & Engineering Electrical Engineering Electronics & Communications Engineering Electronics Engineering Circuits & Components

Introduction	p. 1
Microfabrication processes	p. 9
Micromachining technologies	p. 29
Microscale physics	p. 45
Mechanics	p. 63
Design rules	p. 75
Non-ideal processes	p. 81
Design techniques	p. 93
Electrical components	p. 103
Mechanical components	p. 115
Electrostatic actuators	p. 135
Electro-thermal-compliant actuators	p. 153
Raised structures	p. 165
Polymumps process	p. 177
Summit process	p. 181
Music process	p. 183
Table of Contents provided by Blackwell. All Rights Reserved.

Information Technology

Transmission, Processing & Storage

At a Glance

Hardcover

Shipping

How to return your order

Defective items

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