CMOS Nanoelectronics

Innovative Devices, Architectures, and Applications

By: Nadine Collaert (Editor)

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eText | 19 September 2012 | Edition Number 1

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This book covers one of the most important device architectures that have been widely researched to extend the transistor scaling: FinFET. Starting with theory, the book discusses the advantages and the integration challenges of this device architecture. It addresses in detail the topics such as high-density fin patterning, gate stack design, and s