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Vacuum Mechatronics : Artech House Materials Science Library - Steve Belinski

Vacuum Mechatronics

Artech House Materials Science Library

Paperback Published: 1st March 2001
ISBN: 9781580533263
Number Of Pages: 392

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Prefacep. xi
Introduction to Vacuum Mechatronicsp. 1
Vacuum Environment and Applicationsp. 11
Vacuum Fundamentalsp. 11
Artificial Vacuump. 12
Natural Vacuump. 20
Vacuum: Advantages and Disadvantagesp. 21
Applicationsp. 22
The National Bureau of Standards Primary High-vacuum Standardp. 25
How to Select High Vacuum Pumpsp. 33
Aluminum Alloy Ultrahigh Vacuum System for Molecular Beam Epitaxyp. 43
Advances in Vacuum Contamination Control for Electronic Materials Processingp. 49
Particle Control for Semiconductor Processing in Vacuum Systemsp. 55
Mechanisms of Contaminant Particle Production, Migration and Adhesionp. 63
Control of Particulate Emissions from Plasma-Etching Systemsp. 69
Vacuum Systems for Microelectronicsp. 75
Manufacturing in a Vacuum Environmentp. 81
Vacuum Mechatronics Fundamentalsp. 87
Materialsp. 87
Lubricationp. 96
Energy Transferp. 105
Space Environment and Vacuum Properties of Spacecraft Materialsp. 111
Materials for Ultrahigh Vacuump. 119
Analysis of Outgassing Characteristics of Metalsp. 135
Lubricating of Mechanisms for Vacuum Servicep. 139
Considerations of the Lubrication of Spacecraft Mechanismsp. 145
Contact Heat Transfer-The Last Decadep. 165
Vacuum Mechatronics Componentsp. 179
Actuatorsp. 179
Sensorsp. 185
Energy Transmissionp. 189
Machine Elementsp. 193
Magnetic Levitationp. 196
Ultrahigh Vacuum Line Componentsp. 203
Ultrahigh Vacuum Leak Sealing with a Silicon Resin Productp. 215
A Simple Ultrahigh Vacuum Shape Memory Effect Shutter Mechanismp. 217
Robotic Joint Experiments Under Ultravacuump. 219
Vacuum Mechatronics Controlp. 237
Introductionp. 237
Basic Issuesp. 239
Selected Papersp. 242
Approach to the Dynamically Reconfigurable Robotic Systemsp. 245
The Central Nervous System as a Low and High Level Control Systemp. 263
Logical Sensor Systemsp. 281
Vacuum Mechatronic Systems and Applicationsp. 307
System Componentsp. 307
Applications for Microelectronicsp. 310
Applications for Spacep. 311
Other Applicationsp. 312
The Future of Vacuum Mechatronicsp. 313
Canadarm and the Space Shuttlep. 315
Six Mechanisms Used on the SSM/I Radiometerp. 323
UHV Technique for Intervacuum Sample Transferp. 339
Versatile UHV Sample Transfer Systemp. 347
Piezodriven Spindle for a Specimen Holder in the Vacuum Chamber of a Scanning Electron Microscopep. 351
Precision Table for Ultrahigh Vacuum Made of Aluminum Alloysp. 355
Extended Travel Ultrahigh Vacuum Sample Manipulator with two Orthogonal, Independent Rotationsp. 359
Vacuum Mechatronic Components and Companiesp. 363
Unit Conversion Factorsp. 365
First International Vacuum Mechatronics Workshopp. 367
Reprint Acknowledgementsp. 369
Indexp. 373
Table of Contents provided by Syndetics. All Rights Reserved.

ISBN: 9781580533263
ISBN-10: 1580533264
Series: Artech House Materials Science Library
Audience: General
Format: Paperback
Language: English
Number Of Pages: 392
Published: 1st March 2001
Publisher: Artech House Publishers
Country of Publication: US
Dimensions (cm): 28.0 x 21.0  x 2.0
Weight (kg): 0.88