Thin film deposition is a broad and burgeoning field, with applications ranging from razor blade coatings to quantum-well lasers. However much of the available thin film literature is based on empirical knowledge and focuses only on specific processes or applications. This volume offers a description of the theory and techniques of thin film deposition. Its broad perspective gives readers the tools to objectively evaluate and choose the appropriate thin film process for a specific application. It also includes a list of symmbols and an index.
Thin Film Technology.Gas Kinetics.Vacuum Technology.Evaporation.Deposition.Epitaxy.Chemical Vapor Deposition.High-Energy Techniques.Plasma Processes.Film Characterization.
Number Of Pages: 616
Published: 1st March 1995
Publisher: McGraw-Hill Education - Europe
Country of Publication: US
Dimensions (cm): 23.5 x 16.0
Weight (kg): 1.07
Edition Number: 1