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The Physics of Micro/Nano-Fabrication : Microdevices - Ivor Brodie

The Physics of Micro/Nano-Fabrication


Hardcover Published: 31st January 1993
ISBN: 9780306441462
Number Of Pages: 622

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In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.

Preliminary Survey
Microelectronic Devicesp. 2
Planar Processingp. 11
Microanalysisp. 38
Microdevicesp. 41
Particle Beams: Sources, Optics, and Interactions
Electron Sourcesp. 57
Ion Sourcesp. 69
Electron Gunsp. 95
Components for Electron and Ion Opticsp. 121
Electron Interactionsp. 158
Ion Interactionsp. 190
Photon Sources and Interactionsp. 207
Photon Interactionsp. 240
Plasmas: Physics and Chemistry
General Backgroundp. 259
Collision Processesp. 265
Electron Motion in a Gas Dischargep. 272
Collective Phenomena in Plasmasp. 280
Radio Frequency Glow Dischargesp. 291
Plasma Chemistryp. 295
Vacuum Physicsp. 297
Layering Technologies
Epitaxyp. 319
Chemical Vapor Deposition (CVD)p. 326
Doping by Thermal Diffusionp. 340
Doping by Ion Implantationp. 347
Evaporation in Ultrahigh Vacuump. 381
Cathodic Sputteringp. 385
Organic Layer Formationp. 392
Selective Layer Removal Technologiesp. 399
Thickness and Rate Measurementp. 404
Laser-Assisted Processesp. 407
Electron-Beam-Assisted Processesp. 421
Ion-Beam-Assisted Processesp. 425
Nucleation and Growth in Layer Formationp. 436
Pattern Generation
Optical Lithographyp. 455
The Physics of Photoresistsp. 464
Projection Systemsp. 474
Holographic Lithographyp. 475
X-ray Lithographyp. 477
Synchrotron Radiation for X-ray Lithographyp. 487
Electron-Beam Lithographyp. 491
Ion-Beam Lithographyp. 527
Parallel Imagingp. 551
Serial (Scanning) Imagingp. 565
Limits to Nanofabrication
Limits for MOS Devicesp. 585
Limits for Pattern Generationp. 591
Nanostructuresp. 605
Appendixesp. 617
Author Indexp. 625
Subject Indexp. 635
Table of Contents provided by Blackwell. All Rights Reserved.

ISBN: 9780306441462
ISBN-10: 0306441462
Series: Microdevices
Audience: General
Format: Hardcover
Language: English
Number Of Pages: 622
Published: 31st January 1993
Country of Publication: US
Dimensions (cm): 25.71 x 17.02  x 3.84
Weight (kg): 1.36
Edition Number: 2
Edition Type: Revised

Earn 836 Qantas Points
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