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Soft X-Rays and Extreme Ultraviolet Radiation : Principles and Applications - David Attwood

Soft X-Rays and Extreme Ultraviolet Radiation

Principles and Applications

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Published: 28th August 1999
Format: PDF
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This self-contained, comprehensive book describes the fundamental properties of soft x-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft x-ray biomicroscopy. The author begins by presenting the relevant basic principles such as radiation and scattering, wave propagation, diffraction, and coherence. He then goes on to examine a broad range of phenomena and applications. The topics covered include EUV lithography, biomicroscopy, spectromicroscopy, EUV astronomy, synchrotron radiation, and soft x-ray lasers. He also provides a great deal of useful reference material such as electron binding energies, characteristic emission lines and photo-absorption cross-sections. The book will be of great interest to graduate students and researchers in engineering, physics, chemistry, and the life sciences. It will also appeal to practicing engineers involved in semiconductor fabrication and materials science.

"The region of the electromagnetic spectrum covered by this excellently written and produced book has only become available to exploitation over the last couple of decades or so...every researcher, teacher and student involved with the generation, manipulation or applications of electromagnetic radiation in this part of the spectrum should make space on their desk (not the bookshelf, since it won't spend much time there!) for this wonderful addition to the literature." Contemporary Physics

Preface
Acknowledgements
Introduction
Radiation and scattering at EUV and soft x-ray wavelengths
Wave propagation and refractive index at EUV and soft x-ray wavelengths
Multilayer interference coatings
Synchrotron radiation
Physics of hot dense plasmas
Extreme ultraviolet and soft x-ray lasers
Coherence at short wavelengths
Soft x-ray microscopy with diffractive optics
Extreme ultraviolet and x-ray lithography
Appendices
Index
Table of Contents provided by Publisher. All Rights Reserved.

ISBN: 9780521652148
ISBN-10: 0521652146
Audience: Tertiary; University or College
Format: Hardcover
Language: English
Number Of Pages: 486
Published: 17th January 2000
Country of Publication: GB
Dimensions (cm): 26.1 x 18.4  x 2.9
Weight (kg): 1.06