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Shape Memory Microactuators : Microtechnology and MEMS - Manfred Kohl

Shape Memory Microactuators

Microtechnology and MEMS

Hardcover Published: 30th August 2004
ISBN: 9783540206354
Number Of Pages: 247

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Since the beginning of the nineties, shape memory alloys (SMA) have become available for microsystems technology. Currently the breadth of research and development activities on SMA microactuators ranges from pure scientific topics of materials research to technological problems, such as micromachining, integration and contacting. The book gives an overview of recent achievements, describing the development of microvalves and linear actuators comprehensively from concept through prototype. Further key aspects included are three-dimensional models for handling complex SMA actuator geometries and coupled simulation routines that take multifunctional properties into account. Mechanical and thermal optimization criteria are introduced for actuator design, allowing an optimum use of the shape memory effect. It is shown that some of the prototypes presented, e.g. SMA microgrippers, already outperform conventional components.

Introduction and overviewp. 1
Microactuatorsp. 5
Shape memory effectsp. 25
Shape memory actuationp. 62
SMA microvalvesp. 96
SMA linear actuatorsp. 161
Summaryp. 219
Table of Contents provided by Blackwell. All Rights Reserved.

ISBN: 9783540206354
ISBN-10: 3540206353
Series: Microtechnology and MEMS
Audience: Professional
Format: Hardcover
Language: English
Number Of Pages: 247
Published: 30th August 2004
Publisher: Springer-Verlag Berlin and Heidelberg Gmbh & Co. Kg
Country of Publication: DE
Dimensions (cm): 23.5 x 15.5  x 2.08
Weight (kg): 1.25