The Semiconductor Industrial Hygiene Handbook provides a comprehensive review of the primary industrial hygiene topics relevant to semiconductor processing: chemical and physical agents, and ventilation systems. The sections on electromagnetic fields (EMF), odor investigations, ventilation systems, and ergonomics, are specific to the semiconductor industry. The book also has excellent chapters on newer industrial hygiene concerns that are not specific to the semiconductor industry: ergonomics, indoor air quality, personal protective equipment, plan review, and records retention. While much of the information in these chapters can be applied to all industries, the focus and orientation is specific to issues in the semiconductor industry. An extensive bibliography is included for the reader who wants more in-depth information. This comprehensive book provides the latest information on semiconductor industrial hygiene topics, and is an invaluable single source of information for the industrial hygienist, researcher, facilities engineer, or semiconductor environmental health and safety professional.