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Scanning Electron Microscopy : Physics of Image Formation and Microanalysis - Ludwig Reimer

Scanning Electron Microscopy

Physics of Image Formation and Microanalysis

Paperback Published: 1st December 2010
ISBN: 9783642083723
Number Of Pages: 529

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Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.

Industry Reviews

"...this book is both linguistically and scientifically outstanding. It is an inspiring book for beginners and experienced SEM operators alike. The list of references is especially useful. This volume makes an outstanding contribution to the deeper understanding of the SEM."

T Mulvey, Measurement Science and Technology. 11, No12, December 2000

Electron Optics of a Scanning Electron Microscope.- Electron Scattering and Diffusion.- Emission of Backscattered and Secondary Electrons.- Electron Detectors and Spectrometers.- Image Contrast and Signal Processing.- Electron-Beam-Induced Current and Cathodoluminescence.- Special Techniques in SEM.- Crystal Structure Analysis by Diffraction.- Elemental Analysis and Imaging with X-Rays.

ISBN: 9783642083723
ISBN-10: 3642083722
Series: Springer Optical Sciences
Audience: General
Format: Paperback
Language: English
Number Of Pages: 529
Published: 1st December 2010
Country of Publication: DE
Dimensions (cm): 22.86 x 15.49  x 2.79
Weight (kg): 0.77
Edition Number: 2
Edition Type: Revised

Earn 542 Qantas Points
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