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Rapid Thermal Processing of Semiconductors : Microdevices - Victor E. Borisenko

Rapid Thermal Processing of Semiconductors

Microdevices

Hardcover Published: 31st May 1997
ISBN: 9780306450549
Number Of Pages: 358

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Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.

Nomenclature
Transient Heating of Semiconductors by Radiation
Recrystallization of Implanted Layers and Impurity Behavior in Silicon Crystals
Crystallization, Impurity Diffusion, and Segregation in Polycrystalline Silicon
Component Evaporation, Defect Annealing, and Impurity Diffusion in the III-V Semiconductors
Diffusion Synthesis of Silicides in Thin-Film Metal-Silicon Structures
Rapid Thermal Oxidation and Nitridation
Rapid Thermal Chemical Vapor Deposition
References
Index
Table of Contents provided by Blackwell. All Rights Reserved.

ISBN: 9780306450549
ISBN-10: 0306450542
Series: Microdevices
Audience: Professional
Format: Hardcover
Language: English
Number Of Pages: 358
Published: 31st May 1997
Publisher: Springer Science+Business Media
Country of Publication: US
Dimensions (cm): 25.4 x 17.8  x 2.54
Weight (kg): 0.87