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Particle Control for Semiconductor Manufacturing - R.P. Donovan

Particle Control for Semiconductor Manufacturing

By: R.P. Donovan

Hardcover | 26 January 1990 | Edition Number 1

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There is something Alice-in-Wonderlandish about powerful and vital computer systems being shut down by a microscopic mote that a hay-feverist wouldn''t sneeze at, but as computer chips get smaller, smaller and smaller particles on their surface have a larger and larger effect on their performance. In

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