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Multicomponent and Multilayered Thin Films for Advanced Microtechnologies : Techniques, Fundamentals and Devices - Orlando Auciello

Multicomponent and Multilayered Thin Films for Advanced Microtechnologies

Techniques, Fundamentals and Devices

By: Orlando Auciello (Editor), Jurgen Engemann (Editor)

Hardcover Published: 30th April 1993
ISBN: 9780792322658
Number Of Pages: 633

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The synthesis of multicomponent/multilayered superconducting, conducting, semiconducting and insulating thin films has become the subject of an intensive, worldwide, interdisciplinary research effort. The development of deposition-characterization techniques and the science and technology related to the synthesis of these films are critical for the successful evolution of this interdisciplinary field of research and the implementation of the new materials in a whole new generation of advanced microdevices.
This book contains the lectures and contributed papers on various scientific and technological aspects of multicomponent and multilayered thin films presented at a NATO/ASI. Compared to other recent books on thin films, the distinctive character of this book is the interdisciplinary treatment of the various fields of research related to the different thin film materials mentioned above. The wide range of topics discussed in this book include vacuum-deposition techniques, synthesis-processing, characterization, and devices of multicomponent/multilayered oxide high temperature superconducting, ferroelectric, electro-optic, optical, metallic, silicide, and compound semiconductor thin films.
The book presents an unusual intedisciplinary exchange of ideas between researchers with cross-disciplinary backgrounds and it will be useful to established investigators as well as postdoctoral and graduate students.

Vacuum-deposition techniques; synthesis-processing; characterization; and devices of multicomponent/multilayered oxide high temperature superconducting; ferroelectric; electo-optic; optical; metallic; silicide; and compound semiconductor thin films. (Part contents).

ISBN: 9780792322658
ISBN-10: 0792322657
Series: Nato Science Series E:
Audience: Professional
Format: Hardcover
Language: English
Number Of Pages: 633
Published: 30th April 1993
Publisher: Springer
Country of Publication: NL
Dimensions (cm): 23.5 x 15.5  x 3.81
Weight (kg): 2.41

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