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Modern GaAs Processing Methods : Microwave Library - Ralph E. Williams

Modern GaAs Processing Methods

Microwave Library

Hardcover

Published: 30th June 1990
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Containing updated material from the first edition, this book adds several chapters covering RF testing techniques, reliability, process and manufacturing disciplines and process development (experiment by design).

GaAs material and crystal properties; GaAs devices; general process techniques; cleaning and cleanliness; wet etching; photolithography; nonoptical lithography; plasma processing equipment and plasma-assisted deposition; dry etching; plasma, RIE, RIBE, ion milling; specific process types; device isolation; ohmic contacts; schottky barriers and gate formation; first-level metal, dielectric formation, second-level metal; capacitors, inductors, and resistors.

ISBN: 9780890063439
ISBN-10: 0890063435
Series: Microwave Library
Audience: General
Format: Hardcover
Language: English
Number Of Pages: 460
Published: 30th June 1990
Publisher: Artech House Publishers
Country of Publication: US
Dimensions (cm): 22.9 x 15.2  x 3.0
Weight (kg): 0.84
Edition Number: 2
Edition Type: New edition