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Microwave Discharges : Fundamentals and Applications - Carlos M. Ferreira

Microwave Discharges

Fundamentals and Applications

By: Carlos M. Ferreira (Editor), Michel Moisan (Editor)

Hardcover Published: 31st March 1993
ISBN: 9780306443558
Number Of Pages: 564

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This book is the result of a NATO Advanced Research Workshop held in Vimeiro, Portugal, in May 1992. The objectives of this Workshop were: i) to promote exchange of knowledge between experts in various fields of discharge modeling, plasma diagnostics and microwave plasma applications; ii) to assess the state-of-the-art in this field from a multidisciplinary viewpoint; iii) to identify basic points needing clarification and to estab- lish basic guidelines for future research; iv) to compare the properties of microwave dis- charges to those of RF discharges, as plasma sources for specific applications. Most of the contributors to this book are well known scientists in the field of mi- crowave discharge sources, modeling, diagnostics and applications. The book provides an up-to-date review in this field which should be useful for both the fundamentalists and those using these systems in applications such as surface treatment and elemental analysis. We are gmteful to a number of organizations for providing the fmancial assistance that made the Workshop possible. Foremost is the NATO Scientific Affairs Division, which provided the major contribution for the Workshop. In addition, the following Por- tuguese sources made contributions: Instituto Nacional de Investiga~iio Cientifica, Junta Nacional de Investiga~iio Cientifica e Tecnologica, Centro de Electrodinamica da Univer- sidade Tecnica de Lisboa, Instituto Superior Tecnico, Banco Nacional Ultmmarino, and Regiiio de Turismo do Oeste.

Surface Wave Discharges
The Contribution of Surface-Wave-Sustained Plasmas to HF Plasma Generation, Modeling and Applications: Status and Perspectivesp. 1
Wave Propagation in Bounded Plasmasp. 25
Microwave Discharges: Structures and Stabilityp. 45
Non-Linear Behaviour of Surface Wave Propagation in Plasma-Waveguidesp. 65
Modeling of Surface Wave Produced Discharges in Argon at Low to Intermediate Pressurep. 75
Strongly Damped Surface Waves in Plasmasp. 85
Theory of Low-Pressure Plasma Columns Produced by Electromagnetic Waves in the Presence of a Constant Axial Magnetic Fieldp. 95
Some Aspects of Nonlinear Theory of Ionizing Surface Plasma Wavesp. 105
Microwave Plasma Sources
Surface-Wave Plasma Sourcesp. 117
Modeling of Surface-Wave-Sustained Plasmas in Static Magnetic Fields: A Tool for the Study of Magnetically Assisted HF Plasmasp. 141
ECR Plasma Sourcesp. 161
Distributed ECR: Concept, Performances and Perspectivesp. 181
Large Area Planar Microwave Plasmasp. 205
Fabry-Perot-Type-Microwave Resonatorp. 215
Diagnostics
Diagnostics of Microwave Dischargesp. 225
Thermal Discharges: Experiments and Diagnosticsp. 247
Optical Diagnostics in Radiofrequency Glow and Afterglowp. 269
Optical Diagnostics for High Electron Density Plasmasp. 279
Use of Emissive Probes in HF Plasmasp. 291
Experimental and Theoretical Determination of Electron Energy Distribution Functions in Surface Wave Plasmasp. 303
Modeling
Kinetic Modeling of Microwave Dischargesp. 313
Collision Dominated Electron Kinetics in Low and High Frequency Fieldsp. 339
Power Deposition in Low Pressure Capacitively Coupled RF Dischargesp. 359
Time Dependent Electron Energy Distribution Functions in Molecular Gasesp. 379
Excitation Equilibria in Plasmas; A Classificationp. 395
Nonequilibrium Motion of Electrons and Ions Near Absorbing Boundariesp. 407
Light Sources
Applications of Microwave Discharges to High-Power Light Sourcesp. 427
Applications
Semiconductor Processing Applications of Microwave Plasmasp. 445
Ion Bombardment Effects in Dual Microwave/Radio Frequency Plasmasp. 465
Production of Active Species in Flowing Microwave Discharges for Iron Surface Treatment and Diamond Film Depositionp. 481
Surface Wave Plasmas in O[subscript 2]-N[subscript 2] Mixtures as Active Species Sources for Surface Treatmentsp. 491
Applications of Distributed Electron Cyclotron Resonance (DECR) to Plasma-Surface Interactionp. 503
Applications of Microwave Discharges to Elemental Analysisp. 509
Microwave Methods for the Fabrication of Optical Fibersp. 531
Diamond Films: Procedures and Parametersp. 541
Participantsp. 551
Indexp. 557
Table of Contents provided by Blackwell. All Rights Reserved.

ISBN: 9780306443558
ISBN-10: 0306443554
Series: NATO Asi Series
Audience: Professional
Format: Hardcover
Language: English
Number Of Pages: 564
Published: 31st March 1993
Publisher: SPRINGER VERLAG GMBH
Country of Publication: US
Dimensions (cm): 26.19 x 18.67  x 3.91
Weight (kg): 1.19