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Microsystem Technology and Microrobotics : Microsystem Technology & Microrobotics - Sergej Fatikow

Microsystem Technology and Microrobotics

Microsystem Technology & Microrobotics

Hardcover Published: 20th March 1997
ISBN: 9783540606581
Number Of Pages: 408

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Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots.

Ideas and Problems of Microsystem Technology and Microroboticsp. 1
Microsystems Technology Applicationsp. 24
Techniques of Microsystem Technologyp. 46
Key Processes to Produce Micromechanical Componentsp. 66
Microactuators: Principles and Examplesp. 109
Microsensors: Principles and Examplesp. 209
MST and Information Processingp. 263
Microroboticsp. 303
Bibliographyp. 366
Subject Indexp. 402
Table of Contents provided by Blackwell. All Rights Reserved.

ISBN: 9783540606581
ISBN-10: 3540606580
Series: Microsystem Technology & Microrobotics
Audience: General
Format: Hardcover
Language: English
Number Of Pages: 408
Published: 20th March 1997
Publisher: Springer-Verlag Berlin and Heidelberg Gmbh & Co. Kg
Country of Publication: DE
Dimensions (cm): 24.77 x 16.51  x 1.91
Weight (kg): 0.74