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Microfluidics and Biomems Applications : Microsystems - Francis E. H. Tay

Microfluidics and Biomems Applications


By: Francis E. H. Tay (Editor)

Hardcover Published: September 2002
ISBN: 9781402072376
Number Of Pages: 336

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Microfluidics and BioMEMS Applications central idea is on microfluidics, a relatively new research field which finds its niche in biomedical devices, especially on lab-on-a-chip and related products. Being the essential component in providing driving fluidic flows, an example of micropump is chosen to illustrate a complete cycle in development of microfluidic devices which include literature review, designing and modelling, fabrication and testing. A few articles are included to demonstrate the idea of tackling this research problem, and they cover the main development scope discussed earlier as well as other advanced modelling schemes for microfluidics and beyond.

Scientists and students working in the areas of MEMS and microfluidics will benefit from this book, which may serve both communities as both a reference monograph and a textbook for courses in numerical simulation, and design and development of microfluidic devices.

Table of Contentsp. v
List of Contributorsp. ix
Forewordp. xi
Prefacep. xiii
Acknowledgementsp. xxi
p. 1
Literature Review for Micropumpsp. 3
Origins of Micropump Researchp. 3
Mechanical Micropumpsp. 5
Reciprocating Micropumpsp. 8
Piezoelectric Actuationp. 9
Thermo-pneumatic Actuationp. 10
Electrostatic Actuationp. 11
Pneumatic Actuationp. 12
Shape Memory Alloy (SMA) Actuationp. 13
Peristaltic Micropumpsp. 14
Piezoelectric Actuationp. 15
Thermo-pneumatic Actuationp. 15
Reciprocating Micropumps With Dynamic Micro-valvesp. 16
Non-mechanical Micropumpsp. 18
Electro-hydrodynamic (EHD) Micropumpsp. 18
DC-charge injection EHD micropumpp. 18
Travelling wave voltage EHD micropumpp. 19
Electro-osmotic Micropumpsp. 20
Ultrasonic Micropumpsp. 21
Magneto-hydrodynamic (MHD) Micropumpsp. 22
Motivationp. 23
Design Rules for Micropumpsp. 25
Preliminary Designp. 25
Piezoelectric Actuationp. 26
Compression Ratiop. 29
Determination of Volume Strokep. 30
Analytical Modelp. 31
Finite Element Modelp. 35
Determination of Dead Volumep. 42
Determination of Compression Ratiop. 43
Criterion for Switching of Valvep. 43
Surface Energy Considerationp. 44
Elasto-mechanical Considerationp. 46
Criterion for Self-priming Capabilityp. 48
Criterion for Bubble Tolerancep. 50
Modelling and Simulationp. 53
Background of Microfluidics Systems Modellingp. 53
Governing Equation for Micro-pumpsp. 54
Modelling of the Actuator Unitp. 57
Modelling of the Inlet Valvep. 61
Modelling of the Outlet Valvep. 64
System Model of Proposed Micro-pumpp. 65
Process Development and Fabricationp. 69
Bulk Silicon Micromachiningp. 70
Photolithographyp. 70
Thin Film Depositionp. 72
Oxidation of Siliconp. 72
Low Pressure Chemical Vapour Deposition of Silicon Nitridep. 74
Wet Etchingp. 74
Concave Mask Geometryp. 76
Convex Mask Geometryp. 78
Dry Etchingp. 81
Process Flowp. 82
Silicon Processp. 82
Glass Process For Top Glass Waferp. 92
Glass Process For Bottom Glass Waferp. 93
Wafer Bondingp. 95
Verification and Testingp. 101
Experimental Set-upp. 101
Piezoelectric Actuator Unit Model Verificationp. 104
Analytical Model Verificationp. 104
FEM Model Verificationp. 107
Preliminary Functional Testsp. 109
Conclusions And Recommendationsp. 111
Conclusionsp. 111
Recommendationsp. 112
Referencesp. 115
Appendicesp. 121
Appendix Ap. 121
Appendix Bp. 128
Appendix Cp. 133
Appendix Dp. 138
p. 141
Development of Integrated Microfluidic Devices for Genetic Analysisp. 143
Microfluidic Devices on Printed Circuit Boardp. 185
Nano and Micro Channel Flows of Bio-Molecular Suspensionp. 219
Transport of Liquid in Rectangular Micro-Channels by Electroosmotic Pumpingp. 265
A Development of Slip Model and Slip-Corrected Reynolds Equation for Gas Lubrication in Magnetic Storage Devicep. 287
Short Notes on Particle Image Velocimetry for Micro/Nano Fluidic Measurementsp. 307
Indexp. 331
Table of Contents provided by Syndetics. All Rights Reserved.

ISBN: 9781402072376
ISBN-10: 1402072376
Series: Microsystems
Audience: General
Format: Hardcover
Language: English
Number Of Pages: 336
Published: September 2002
Country of Publication: US
Dimensions (cm): 23.39 x 15.6  x 2.06
Weight (kg): 0.69

Earn 678 Qantas Points
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