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MEMS Mechanical Sensors : Mems--Microelectromechanical Systems Series - Steve P. Beeby

MEMS Mechanical Sensors

Mems--Microelectromechanical Systems Series

Hardcover Published: 30th April 2004
ISBN: 9781580535366
Number Of Pages: 284

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The main aim of this book is to give an overview of MEMS mechanical transducers. The text focuses mainly on examples of commercial and research devices; however, attention is also given to manufacturing techniques and materials, as well as the basic principles behind the operation of these devices.

Prefacep. ix
Introductionp. 1
Motivation for the Bookp. 1
What Are MEMS?p. 2
Mechanical Transducersp. 3
Why Silicon?p. 4
For Whom Is This Book Intended?p. 5
Referencesp. 5
Materials and Fabrication Techniquesp. 7
Introductionp. 7
Materialsp. 7
Substratesp. 7
Additive Materialsp. 11
Fabrication Techniquesp. 11
Depositionp. 12
Lithographyp. 17
Etchingp. 21
Surface Micromachiningp. 28
Wafer Bondingp. 29
Thick-Film Screen Printingp. 32
Electroplatingp. 33
LIGAp. 34
Porous Siliconp. 35
Electrochemical Etch Stopp. 35
Focused Ion Beam Etching and Depositionp. 36
Referencesp. 36
MEMS Simulation and Design Toolsp. 39
Introductionp. 39
Simulation and Design Toolsp. 40
Behavioral Modeling Simulation Toolsp. 40
Finite Element Simulation Toolsp. 43
Referencesp. 56
Mechanical Sensor Packagingp. 57
Introductionp. 57
Standard IC Packagesp. 58
Ceramic Packagesp. 58
Plastic Packagesp. 59
Metal Packagesp. 59
Packaging Processesp. 59
Electrical Interconnectsp. 60
Methods of Die Attachmentp. 63
Sealing Techniquesp. 65
MEMS Mechanical Sensor Packagingp. 66
Protection of the Sensor from Environmental Effectsp. 67
Protecting the Environment from the Sensorp. 71
Mechanical Isolation of Sensor Chipsp. 71
Conclusionsp. 80
Referencesp. 81
Mechanical Transduction Techniquesp. 85
Piezoresistivityp. 85
Piezoelectricityp. 89
Capacitive Techniquesp. 92
Optical Techniquesp. 94
Intensityp. 94
Phasep. 95
Wavelengthp. 96
Spatial Positionp. 96
Frequencyp. 96
Polarizationp. 97
Resonant Techniquesp. 97
Vibration Excitation and Detection Mechanismsp. 98
Resonator Design Characteristicsp. 99
Actuation Techniquesp. 104
Electrostaticp. 104
Piezoelectricp. 107
Thermalp. 107
Magneticp. 109
Smart Sensorsp. 109
Referencesp. 112
Pressure Sensorsp. 113
Introductionp. 113
Physics of Pressure Sensingp. 114
Pressure Sensor Specificationsp. 117
Dynamic Pressure Sensingp. 120
Pressure Sensor Typesp. 121
Traditional Pressure Sensorsp. 121
Manometerp. 121
Aneroid Barometersp. 122
Bourdon Tubep. 122
Vacuum Sensorsp. 123
Diaphragm-Based Pressure Sensorsp. 123
Analysis of Small Deflection Diaphragmp. 125
Medium Deflection Diaphragm Analysisp. 127
Membrane Analysisp. 127
Bossed Diaphragm Analysisp. 128
Corrugated Diaphragmsp. 129
Traditional Diaphragm Transduction Mechanismsp. 129
MEMS Technology Pressure Sensorsp. 130
Micromachined Silicon Diaphragmsp. 130
Piezoresistive Pressure Sensorsp. 132
Capacitive Pressure Sensorsp. 137
Resonant Pressure Sensorsp. 139
Other MEMS Pressure Sensing Techniquesp. 142
Microphonesp. 143
Conclusionsp. 145
Referencesp. 145
Force and Torque Sensorsp. 153
Introductionp. 153
Silicon-Based Devicesp. 154
Resonant and SAW Devicesp. 157
Optical Devicesp. 159
Capacitive Devicesp. 160
Magnetic Devicesp. 162
Atomic Force Microscope and Scanning Probesp. 164
Tactile Sensorsp. 166
Future Devicesp. 168
Referencesp. 168
Inertial Sensorsp. 173
Introductionp. 173
Micromachined Accelerometerp. 175
Principle of Operationp. 175
Research Prototype Micromachined Accelerometersp. 180
Commercial Micromachined Accelerometerp. 192
Micromachined Gyroscopesp. 195
Principle of Operationp. 195
Research Prototypesp. 199
Commercial Micromachined Gyroscopesp. 204
Future Inertial Micromachined Sensorsp. 206
Referencesp. 207
Flow Sensorsp. 213
Introduction to Microfluidics and Applications for Micro Flow Sensorsp. 214
Thermal Flow Sensorsp. 217
Research Devicesp. 219
Commercial Devicesp. 225
Pressure Difference Flow Sensorsp. 229
Force Transfer Flow Sensorsp. 232
Drag Forcep. 232
Lift Forcep. 235
Coriolis Forcep. 236
Static Turbine Flow Meterp. 238
Nonthermal Time of Flight Flow Sensorsp. 239
Electrohydrodynamicp. 239
Electrochemicalp. 240
Flow Sensor Based on the Faraday Principlep. 241
Flow Sensor Based on the Periodic Flapping Motionp. 242
Flow Imagingp. 243
Optical Flow Measurementp. 245
Fluid Velocity Measurementp. 245
Particle Detection and Countingp. 246
Multiphase Flow Detectionp. 246
Turbulent Flow Studiesp. 247
Conclusionp. 248
Referencesp. 250
About the Authorsp. 257
Indexp. 259
Table of Contents provided by Rittenhouse. All Rights Reserved.

ISBN: 9781580535366
ISBN-10: 1580535364
Series: Mems--Microelectromechanical Systems Series
Audience: Tertiary; University or College
Format: Hardcover
Language: English
Number Of Pages: 284
Published: 30th April 2004
Publisher: Artech House Publishers
Country of Publication: US
Dimensions (cm): 25.4 x 17.8  x 1.7
Weight (kg): 0.64