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Materials Science of Thin Films : Depositon and Structure - Milton Ohring

Materials Science of Thin Films

Depositon and Structure

By: Milton Ohring

Hardcover | 15 October 2001 | Edition Number 2

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1.1. Introduction
1.2. Structure
1.3. Defects in Solids
1.4. Bonds and Bands in Materials
1.5. Thermodynamics of Materials 1.6. Kinetics
1.7. Nucleation
1.8 . An Introduction to Mechanical Behavior
1.9. Conclusion
Exercises
References
Chapter 2 Vacu um Science and Technology
2.1. Introduction
2 .2. Kinetic Theory of Gases
2.3. Gas Transport and Pumping
2.4. Vacuum Pumps
2.5. Vacuum Systems
2.6. Conclusion
Exercises
ReferencesChapter 3 Thin-Film Evaporation Processes
3.1. Introduction
3.2. The Physics and Chemistry of Evaporation
3.3. Film Thickness Uniformity and Purity
3.4 . Evaporation Hardware
3.5. Evaporation Processes and Appli
Industry Reviews
Praise for the First Edition "There is a need for new, comprehensive texts and references in [advanced materials processing] and its subdisciplines. This has been especially true for thin films, and of the several recent books on the subject, Milton Ohring's extensive volume is without a doubt the best." --NATURE "Ohring's very timely and excellent book fills a long-existing need in materials education at the graduate level...The book is very well written, presented, and illustrated. It will prove useful to the scientist or engineer in coatings, to the college senior working on a project, and especially to graduate students in materials science and engineering and to faculty involved in teaching or research in the area of thin films. An excellent acquisition for an academic library." --CHOICE "The author writes in a fluent and engaging style which the student should have little trouble in understanding. His examples and technical insights do a great deal to make his text readable..." --R.J. BORG "The combination of teaching, research, and industrial involvement has provide Profesor Ohring with a broad perspective of thin film science and technoloy and tremendous insight into the needs of students entering this exciting field. His insight and experience are quite evident in this textbook." --JOHN L. VOSSEN, John Vossen Associates, Inc. "The text is easy to read, technically correct, unfolds in a logical manner, and includes a large number of important features related to thin films. I congratulate the author for proposing a thoughtful treatment of this increasingly popular subject." --CHARLES L. BAUER, Carnegie Mellon University "Professor Milt Ohring has a long and unique perspective of thin film science from his dealings with academia and industry. This book represents his accumulated experiences of teaching and research. Thin film science is at the heart of many of our most advanced technologies. This book should prove invaluable not only to the university student but also to the professional who needs a broad overview of this important field." --J.M. POATE, AT&T Bell Laboratories

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