| Foreword to First Edition | p. xi |
| Preface | p. xiii |
| Acknowledgments | p. xvii |
| A Historical Perspective | p. xix |
| A Review of Materials Science | p. 1 |
| Introduction | p. 1 |
| Structure | p. 2 |
| Defects in Solids | p. 10 |
| Bonds and Bands in Materials | p. 14 |
| Thermodynamics of Materials | p. 24 |
| Kinetics | p. 36 |
| Nucleation | p. 44 |
| An Introduction to Mechanical Behavior | p. 47 |
| Conclusion | p. 52 |
| Exercises | p. 52 |
| References | p. 55 |
| Vacuum Science and Technology | p. 57 |
| Introduction | p. 57 |
| Kinetic Theory of Gases | p. 58 |
| Gas Transport and Pumping | p. 63 |
| Vacuum Pumps | p. 70 |
| Vacuum Systems | p. 81 |
| Conclusion | p. 88 |
| Exercises | p. 90 |
| References | p. 92 |
| Thin-Film Evaporation Processes | p. 95 |
| Introduction | p. 95 |
| The Physics and Chemistry of Evaporation | p. 97 |
| Film Thickness Uniformity and Purity | p. 106 |
| Evaporation Hardware | p. 118 |
| Evaporation Processes and Applications | p. 128 |
| Conclusion | p. 139 |
| Exercises | p. 140 |
| References | p. 143 |
| Discharges, Plasmas, and Ion-Surface Interactions | p. 145 |
| Introduction | p. 145 |
| Plasmas, Discharges, and Arcs | p. 147 |
| Fundamentals of Plasma Physics | p. 152 |
| Reactions in Plasmas | p. 164 |
| Physics of Sputtering | p. 170 |
| Ion Bombardment Modification of Growing Films | p. 184 |
| Conclusion | p. 196 |
| Exercises | p. 198 |
| References | p. 201 |
| Plasma and Ion Beam Processing of Thin Films | p. 203 |
| Introduction | p. 203 |
| DC, AC, and Reactive Sputtering Processes | p. 205 |
| Magnetron Sputtering | p. 222 |
| Plasma Etching | p. 233 |
| Hybrid and Modified PVD Processes | p. 252 |
| Conclusion | p. 269 |
| Exercises | p. 270 |
| References | p. 273 |
| Chemical Vapor Deposition | p. 277 |
| Introduction | p. 277 |
| Reaction Types | p. 281 |
| Thermodynamics of CVD | p. 287 |
| Gas Transport | p. 293 |
| Film Growth Kinetics | p. 303 |
| Thermal CVD Processes | p. 312 |
| Plasma-Enhanced CVD Processes | p. 323 |
| Some CVD Materials Issues | p. 334 |
| Safety | p. 347 |
| Conclusion | p. 349 |
| Exercises | p. 350 |
| References | p. 353 |
| Substrate Surfaces and Thin-Film Nucleation | p. 357 |
| Introduction | p. 357 |
| An Atomic View of Substrate Surfaces | p. 360 |
| Thermodynamic Aspects of Nucleation | p. 376 |
| Kinetic Processes in Nucleation and Growth | p. 386 |
| Experimental Studies of Nucleation and Growth | p. 400 |
| Conclusion | p. 409 |
| Exercises | p. 410 |
| References | p. 414 |
| Epitaxy | p. 417 |
| Introduction | p. 417 |
| Manifestations of Epitaxy | p. 420 |
| Lattice Misfit and Defects in Epitaxial Films | p. 429 |
| Epitaxy of Compound Semiconductors | p. 439 |
| High-Temperature Methods for Depositing Epitaxial Semiconductor Films | p. 453 |
| Low-Temperature Methods for Depositing Epitaxial Semiconductor Films | p. 466 |
| Mechanisms and Characterization of Epitaxial Film Growth | p. 476 |
| Conclusion | p. 488 |
| Exercises | p. 489 |
| References | p. 492 |
| Film Structure | p. 495 |
| Introduction | p. 495 |
| Structural Morphology of Deposited Films and Coatings | p. 497 |
| Computational Simulations of Film Structure | p. 510 |
| Grain Growth, Texture, and Microstructure Control in Thin Films | p. 520 |
| Constrained Film Structures | p. 533 |
| Amorphous Thin Films | p. 540 |
| Conclusion | p. 552 |
| Exercises | p. 553 |
| References | p. 556 |
| Characterization of Thin Films and Surfaces | p. 559 |
| Introduction | p. 559 |
| Film Thickness | p. 562 |
| Structural Characterization of Films and Surfaces | p. 583 |
| Chemical Characterization of Surfaces and Films | p. 606 |
| Conclusion | p. 633 |
| Exercises | p. 635 |
| References | p. 639 |
| Interdiffusion, Reactions, and Transformations in Thin Films | p. 641 |
| Introduction | p. 641 |
| Fundamentals of Diffusion | p. 643 |
| Interdiffusion in Thin Metal Films | p. 659 |
| Compound Formation and Phase Transformations in Thin Films | p. 669 |
| Metal-Semiconductor Reactions | p. 682 |
| Mass Transport in Thin Films under Large Driving Forces | p. 695 |
| Conclusion | p. 704 |
| Exercises | p. 704 |
| References | p. 708 |
| Mechanical Properties of Thin Films | p. 711 |
| Introduction | p. 711 |
| Mechanical Testing and Strength of Thin Films | p. 713 |
| Analysis of Internal Stress | p. 723 |
| Techniques for Measuring Internal Stress in Films | p. 735 |
| Internal Stresses in Thin Films and Their Causes | p. 742 |
| Mechanical Relaxation Effects in Stressed Films | p. 754 |
| Adhesion | p. 764 |
| Conclusion | p. 775 |
| Exercises | p. 776 |
| References | p. 779 |
| Index | p. 783 |
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