Track My Order
Help Centre
Likes
My Wish ListsLogin / Join
Booktopia
Australia's local bookstore
Get Free Shipping on orders over $79
Ion Implantation and Annealing Applications, Science and Technology : Contributions from IIT School, Edition 2024 - Wilfried Lerch

Ion Implantation and Annealing Applications, Science and Technology

Contributions from IIT School, Edition 2024

By: Wilfried Lerch (Editor), Michael Current (Editor)

eText | 29 May 2026

At a Glance

eText

$379.01

or 4 interest-free payments of $94.75 with

 or 

Instant online reading in your Booktopia eTextbook Library *

Why choose an eTextbook?

Instant Access *

Purchase and read your book immediately

Read Aloud

Listen and follow along as Bookshelf reads to you

Study Tools

Built-in study tools like highlights and more

* eTextbooks are not downloadable to your eReader or an app and can be accessed via web browsers only. You must be connected to the internet and have no technical issues with your device or browser that could prevent the eTextbook from operating.

This book compiles the insights and teachings from the 2024 IIT School lectures, offering a comprehensive look at ion implantation and annealing in semiconductor manufacturing. It covers the history of integrated circuits, common applications in CMOS technology, ion sources, radiation damage, annealing of materials like silicon (Si), silicon carbide (SiC) and gallium nitride (GaN), and advances in cluster ion beam technology. This edition, enriched by expert contributions, serves as an essential reference for students and professionals in materials science and microelectronics.

on
Desktop
Tablet
Mobile

You Can Find This eBook In

Non-FictionSciencePhysicsMaterials & States of MatterEngineering & TechnologyElectronics & Communications EngineeringElectronics EngineeringElectronic Devices & MaterialsSemi-Conductors & Super-Conductors

More in Materials & States of Matter

Nuclear Fusion : At Last? - Andrea Di Vita

eTEXT

Nuclear Fusion

At Last?

eText

$117.69

This product is categorised by