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Introduction to VLSI Process Engineering - Y. Naka

Introduction to VLSI Process Engineering

By: Y. Naka (Editor), K. Sugawara (Editor), C. McGreavy (Editor)

Hardcover Published: 30th June 1993
ISBN: 9780412395505
Number Of Pages: 210

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Integrated circuits are finding wider applications through a range of industries: as well as computers, they now play an important role in automobiles, manufacturing machinery and scientific instruments. This has been possible because of the greater variety of integrated circuits that are being put on even smaller chips with an increasing level of integration. This introduction presents the design principles for devices, describes the overall VLSI process, and goes on to deal with the essential manufacturing technologies and inspection procedures. Particular attention is given to achieving the high quality needed for reliable products. The final chapter is devoted to highlighting the range of unresolved problems in VLSI processing as the scale of integration grows, and providing pointers towards possible solutions.

Industry Reviews

...an extremely good text... - Microelectronics Journal

Editors and contributors
Preface to the English language edition
Coming age of VLSIp. 1
Semiconductor marketp. 7
Evolution of semiconductorsp. 22
Characteristics of VLSIp. 50
VLSI process engineering operationsp. 71
Packaging and process monitoring technologyp. 121
Production of silicon wafers and environmental problemsp. 147
Process engineering aspects of VLSI productionp. 166
Appendix A Glossaryp. 193
Appendix B List of abbreviationsp. 198
Referencesp. 201
Indexp. 205
Table of Contents provided by Blackwell. All Rights Reserved.

ISBN: 9780412395505
ISBN-10: 0412395509
Audience: Professional
Format: Hardcover
Language: English
Number Of Pages: 210
Published: 30th June 1993
Publisher: Chapman and Hall
Country of Publication: GB
Dimensions (cm): 24.77 x 16.51  x 1.91
Weight (kg): 0.43