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Intro To Microlithography : American Chemical Society - Larry F. Thompson

Intro To Microlithography

American Chemical Society

Hardcover

Published: 1st January 1994
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Updated and expanded! Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major topics: the physics of the lithographic process, organic resist materials, resist processing, and plasma etching. Designed as a tutorial for researchers with no experience in the field, as well as those experienced in microlithography. Will also prove invaluable to those already involved in microlithography. Includes numerous references for more detailed reading on specific aspects of microlithography.

An Introduction to Lithography
The Lithographic Process: The Physics
Organic Resist Materials
Resist Processing
Plasma Etching
Table of Contents provided by Publisher. All Rights Reserved.

ISBN: 9780841228481
ISBN-10: 0841228485
Series: American Chemical Society
Audience: Tertiary; University or College
Format: Hardcover
Language: English
Number Of Pages: 540
Published: 1st January 1994
Publisher: American Chemical Society
Country of Publication: US
Dimensions (cm): 23.6 x 15.8  x 3.4
Weight (kg): 0.89
Edition Number: 2
Edition Type: Revised