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Handbook of Semiconductor Silicon Technology : Materials Science and Process Technology - William C. O'Mara

Handbook of Semiconductor Silicon Technology

Materials Science and Process Technology

Hardcover

Published: 14th January 1991
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This handbook is a comprehensive summary of the science, technology and manufacturing of semiconductor silicon material. Every known property of silicon is detailed. A complete set of silicon binary phase diagrams is included. Practical aspects such as materials handling, safety, impurity and defect reduction are also discussed in depth. Fundamentals in the areas of silicon precursor compounds, polysilicon, silicon crystal growth, water fabrication, expitaxial and CVD deposition are addressed by experts in each of these areas. Materials properties covered include electrical, optical and mechanical properties, deep level impurities and carrier lifetime, and thermochemistry, as well as specific sections on oxygen, carbon and nitrogen impurities. The book contains an extensive set of references, tables of materials contents, and silicon properties, and a presentation on the state of the art of materials manufacturing. Contents Include: Silicon Precursors: Their Manufacture and Properties: Precursor Manufacture Safety. Polysilicon Preparation: Polysilicon Production Technology Alternative Chlorine-Based, Semiconductor Grade, Polysilicon Feedstocks Alternative Polysilicon Reactor Selections. Crystal Growth of Silicon: Melt Growth Theory Novel Czochralski Crystal Growth Trends in Silicon Crystal Growth. Silicon Wafer Preparation: Crystal Shaping, Wafering Edge Rounding, Lapping Polishing, Cleaning In-Process Measurements. Silicon Epitaxy: Surface Preparation for Silicon Epitaxial Growth Growth of Silicon Epitaxy by CVD Dopant Incorporation Equipment for Epitaxy by CVD. Silicon Material Properties: Crystallographic Properties Electrical Properties Optical Properties Thermal and Mechanical Properties. Oxygen, Carbon and Nitrogen in Silicon: Oxygen Cluster and Precipitate Formation Mechanical Strengthening and Wafer Warpage Device Processing. Carrier Lifetimes in Silicon: Recombination Lifetimes Generation Lifetimes Role of Lifetimes on Device Currents Lifetime Measurement Techniques. Preparation and Properties of Polycrystallin-Silicon Films: Deposition Structure Oxidation Conduction Applications. Phase Diagrams: Phase Changes Segregation Coefficient and Zone Refining Retrograde Solubility.

"...comprehensive, up-to-date book..." - SAMPE Journal

Silicon Precursors: Their Manufacture and Properties
Polysilicon Preparation
Crystal Growth of Silicon
Silicon Wafer Preparation
Silicon Epitaxy
Silicon Material Properties
Oxygen, Carbon and Nitrogen in Silicon
Carrier Lifetimes in Silicon
Preparation and Properties of Polycrystalline-Silicon Films
Silicon Phase Diagrams
References
Index
Table of Contents provided by Publisher. All Rights Reserved.

ISBN: 9780815512370
ISBN-10: 0815512376
Series: Materials Science and Process Technology
Audience: Professional
Format: Hardcover
Language: English
Number Of Pages: 815
Published: 14th January 1991
Country of Publication: US
Dimensions (cm): 23.27 x 16.1  x 4.27
Weight (kg): 1.18