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Handbook of Contamination Control in Microelectronics : Principles, Applications and Technology - Donald L. Tolliver

Handbook of Contamination Control in Microelectronics

Principles, Applications and Technology

Hardcover

Published: 1st June 1988
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Contamination control technology is now a prerequisite of modern electronics. This has not always been the case. Advanced microelectronic circuitry has increased dramatically in its complexity and degree of integration or density of active components, thus necessitating meticulous contamination control. Device defect density is so critical to the successful manufacturing of these devices that only the most astute companies with advance contamination control technology will be able to survive in the marketplace. This book introduces contamination control in a comprehensive manner. It covers the basics for the beginner, and delves in depth into the more critical issues of process engineering and circuit manufacturing for the more advanced reader. The reader will begin to see how the puzzle of contamination control comes together and to focus on the fundamentals required for excellence in modern semiconductor manufacturing. What makes the area of contamination control unique is its ubiquitous nature, across all facets of semiconductor manufacturing. Clean room technology, well-recognized as a fundamental requirement in modern day circuit manufacturing, barely scratches the surface in total contamination control. This handbook defines and describes most of the major categories in current contamination control technology. Contents Include: Preface: Aerosol Filtration Technology Instrumentation for Aerosol Measurement Clean Room Garments and Fabrics Guidelines for Clean Room Management and Discipline Electrostatics in Clean Rooms Ultrahigh Purity Water-New Frontiers Deionized (DI) Water Filtration Technology Monitoring Systems for Semiconductor Fluids Particles in Ultrapure Process Gases Contamination Control and Concerns in VLSI Lithography Contamination Control in Mircoelectronic Chemicals Surface Particle Detection Technology Particle-Contamination by Process Equipment Wafer Automation and Transfer Systems. Glossary.

"ashould be in the library of all microelectronics engineers and designers." - Microelectronics & Reliability

Aerosol Filtration Technology
Instrumentation for Aerosol Measurement
Clean Room Garments and Fabrics
Guidelines for Clean Room Management and Discipline
Electrostatics in Clean Rooms
Ultra High Purity Water-New Frontiers
Deionized (DI) Water Filtration Technology
Monitoring System for Semiconductor Fluids
Particles in Ultrapure Process Gases
Contamination Control and Concerns in VLSI Lithography
Contamination Control in Electronic Chemicals
Surface Particle Detection Technology
Particle Contamination by Process Equipment
Wafer Automation and Transfer System
Conclusion
References
Glossary
Index
Table of Contents provided by Publisher. All Rights Reserved.

ISBN: 9780815511519
ISBN-10: 0815511515
Series: Materials Science and Process Technology
Audience: Professional
Format: Hardcover
Language: English
Number Of Pages: 509
Published: 1st June 1988
Country of Publication: US
Dimensions (cm): 23.42 x 15.85  x 3.0
Weight (kg): 0.74