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Glow Discharge Processes : Sputtering and Plasma Etching - Brian Chapman

Glow Discharge Processes

Sputtering and Plasma Etching

Hardcover

Published: 25th September 1980
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Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications--practical techniques diligently related to fundamentals. Subjects range from voltage, distributions encountered in plasma etching systems to plasma-electron interactions that contribute to sustaining the discharge.

Gases.

Gas Phase Collision Processes.

Plasmas.

DC Glow Discharges.

RF Discharges.

Sputtering.

Plasma Etching.

Appendices.

Index.

ISBN: 9780471078289
ISBN-10: 047107828X
Audience: Professional
Format: Hardcover
Language: English
Number Of Pages: 432
Published: 25th September 1980
Country of Publication: US
Dimensions (cm): 24.05 x 16.35  x 3.27
Weight (kg): 0.84
Edition Number: 1