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Glow-Discharge Hydrogenated Amorphous Silicon : Advances in Solid State Technology - Kazuyoshi Tanaka

Glow-Discharge Hydrogenated Amorphous Silicon

Advances in Solid State Technology

By: Kazuyoshi Tanaka (Editor)

Hardcover Published: 30th November 1989
ISBN: 9780792303091
Number Of Pages: 277

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A graduate-level description of recent Japanese research on the chemistry of amorphous silicon film deposition associated with plasma CVD, a step in producing amorphous semiconductors. Reports on studies (of microscopic processes of gas-phase reaction as well as chemical reactions on the film growin

ISBN: 9780792303091
ISBN-10: 0792303091
Series: Advances in Solid State Technology
Audience: Professional
Format: Hardcover
Language: English
Number Of Pages: 277
Published: 30th November 1989
Publisher: Springer
Country of Publication: NL
Dimensions (cm): 23.4 x 15.6  x 1.7
Weight (kg): 1.3