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Fundamental Electron Interactions with Plasma Processing Gases : Physics of Atoms and Molecules - L. G. Christophorou

Fundamental Electron Interactions with Plasma Processing Gases

Physics of Atoms and Molecules

Hardcover

Published: 31st December 2003
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This volume deals with the basic knowledge and understanding of fundamental interactions of low energy electrons with molecules. It pro­ vides an up-to-date and comprehensive account of the fundamental in­ teractions of low-energy electrons with molecules of current interest in modern technology, especially the semiconductor industry. The primary electron-molecule interaction processes of elastic and in­ elastic electron scattering, electron-impact ionization, electron-impact dissociation, and electron attachment are discussed, and state-of-the­ art authoritative data on the cross sections of these processes as well as on rate and transport coefficients are provided. This fundamental knowledge has been obtained by us over the last eight years through a critical review and comprehensive assessment of "all" available data on low-energy electron collisions with plasma processing gases which we conducted at the National Institute of Standards and Technology (NIST). Data from this work were originally published in the Journal of Physical and Chemical Reference Data, and have been updated and expanded here. The fundamental electron-molecule interaction processes are discussed in Chapter 1. The cross sections and rate coefficients most often used to describe these interactions are defined in Chapter 2, where some recent advances in the methods employed for their measurement or calculation are outlined. The methodology we adopted for the critical evaluation, synthesis, and assessment of the existing data is described in Chapter 3. The critically assessed data and recommended or suggested cross sections and rate and transport coefficients for ten plasma etching gases are presented and discussed in Chapters 4, 5, and 6.

Preface
Dedication
Acknowledgments
Fundamental Electron-Molecule Interactions and Their Technological Significancep. 1
Introductionp. 1
Low Energy Electron-Molecule Interaction Processesp. 2
Significance of Electron-Molecule Interactions in Plasma Processingp. 37
The Present Workp. 47
Electron-Molecule Interactions in the Gas Phase: Cross Sections and Coefficientsp. 61
Introductionp. 61
Collision Cross Sectionsp. 62
Coefficients and Rate Constantsp. 87
Boltzmann-Code-Generated Collision Cross-Section Setsp. 100
Synthesis and Assessment of Electron Collision Datap. 113
Introductionp. 113
Synthesis, Assessment, and Recommendation of Datap. 113
Deduction of Unavailable Data and Understanding from Assessed Data, New Measurements, and Data Needsp. 121
Dissemination and Updating of the Databasep. 129
Electron Interactions with CF[subscript 4], C[subscript 2]F[subscript 6], and C[subscript 3]F[subscript 8]p. 135
Introductionp. 135
Electron Interactions with CF[subscript 4]p. 136
Electron Interactions with C[subscript 2]F[subscript 6]p. 220
Electron Interactions with C[subscript 3]F[subscript 8]p. 269
Electron Interactions with CHF[subscript 3], CF[subscript 3]I, and c-C[subscript 4]F[subscript 8]p. 335
Introductionp. 335
Electron Interactions with CHF[subscript 3]p. 335
Electron Interactions with CF[subscript 3]Ip. 372
Electron Interactions with c-C[subscript 4]F[subscript 8]p. 399
Electron Interactions with Cl[subscript 2], CCl[subscript 2]F[subscript 2], BCl[subscript 3], and SF[subscript 6]p. 449
Introductionp. 449
Electron Interactions with Cl[subscript 2]p. 449
Electron Interactions with CCl[subscript 2]F[subscript 2]p. 516
Electron Interactions with BCl[subscript 3]p. 574
Electron Interactions with SF[subscript 6]p. 610
Indexp. 765
Table of Contents provided by Blackwell. All Rights Reserved.

ISBN: 9780306480379
ISBN-10: 0306480379
Series: Physics of Atoms and Molecules
Audience: Tertiary; University or College
Format: Hardcover
Language: English
Number Of Pages: 781
Published: 31st December 2003
Publisher: Springer Science+Business Media
Country of Publication: US
Dimensions (cm): 23.5 x 15.5  x 5.08
Weight (kg): 2.85