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Focused Ion Beam Systems : Basics and Applications - Yao Nan

Focused Ion Beam Systems

Basics and Applications

By: Yao Nan (Editor)

Paperback Published: 14th April 2011
ISBN: 9780521158596
Number Of Pages: 408

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The focused ion beam (FIB) system is an important tool for understanding and manipulating the structure of materials at the nanoscale. Combining this system with an electron beam creates a DualBeam - a single system that can function as an imaging, analytical and sample modification tool. Presenting the principles, capabilities, challenges and applications of the FIB technique, this edited volume, first published in 2007, comprehensively covers the ion beam technology including the DualBeam. The basic principles of ion beam and two-beam systems, their interaction with materials, etching and deposition are all covered, as well as in situ materials characterization, sample preparation, three-dimensional reconstruction and applications in biomaterials and nanotechnology. With nanostructured materials becoming increasingly important in micromechanical, electronic and magnetic devices, this self-contained review of the range of ion beam methods, their advantages, and when best to implement them is a valuable resource for researchers in materials science, electrical engineering and nanotechnology.

List of contributors
Preface
Introduction to the focused ion beam system
Interaction of ions with matter
Gas assisted ion beam etching and deposition Hyoung Ho (Chris) Kang
Imagining using electrons and ion beams
Characterization methods using FIB/SEM DualBeam instrumentation
High-density FIB-SEM 3D nanotomography: with applications of real-time imaging during FIB milling
Fabrication of nanoscale structures using ion beams
Preparation for physico-chemical analysis
In-situ sample manipulation and imaging
Micro-machining and mask repair
Three-dimensional visualization of nanostructured materials using focused ion beam tomography
Ion beam implantation of surface layers
Applications for biological materials
Focused ion beam systems as a multifunctional tool for nanotechnology
Index
Table of Contents provided by Publisher. All Rights Reserved.

ISBN: 9780521158596
ISBN-10: 0521158591
Audience: Professional
Format: Paperback
Language: English
Number Of Pages: 408
Published: 14th April 2011
Publisher: Cambridge University Press
Country of Publication: GB
Dimensions (cm): 24.4 x 17.0  x 2.1
Weight (kg): 0.65