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Excimer Lasers


By: Lucien D. Laude (Editor)

Hardcover Published: 30th April 1994
ISBN: 9780792328193
Number Of Pages: 496

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Among the many intense light sources, excimer lasers have a unique set of properties that place them at the forefront of tooling for material processing. Their extreme versatility means that they can be used in many areas of materials science and medicine. But three conditions need to be fulfilled in order that their versatility be truly appreciated and exploited: the characteristics and limitations of the sources must be known; the basic excimer laser processes should become reasonably widely known; and problems in search of a solution should be clearly identified. This text covers all three of these points in an instructive and logical way. Both instrumental and fundamental aspects of excimer laser interaction with matter are presented, with examples drawn from a wide range of materials. The articles gathered here are tutorial in their nature, thus making them suitable for a wide readership, from recent graduates and postgraduate students to those established scientists entering the field.

Excimer Lasers: Current Status and Future Developmentsp. 1
Compact Phototriggered Switchless Lasers and Very Large X-Ray Preionized Excimer Lasers : Innovative Technologies of New Excimer Lasersp. 15
Maintenance Issues of Excimer Lasers in a Production or Industrial Research Environmentp. 27
Pulsed-Laser Ablationp. 39
Photophysical Ablation of Organic Polymersp. 59
Dynamics of the Vapor Plume in Laser Materials Ablationp. 79
Surface and Three-dimensional Processing by Laser Chemical Vapor Depositionp. 91
Chemical Vapour Deposition of Crystalline and Amorphous Carbon, Silicon and Germanium Filmsp. 103
Laser Excitation and Detection of Surface Acoustic Wave Pulsesp. 121
Gas and Adsorbed-Phase UV Photochemistry of Tetramethyltin (TMT) Probed by In-Situ Optical Diagnostics and Surface-Sensitive Techniquesp. 133
Materials Analysis Based on Quantitative Laser Ionizationp. 153
Time-resolved Diagnostics of Excimer Laser-Generated Ablation Plasmas used for Pulsed Laser Depositionp. 165
Excimer Laser Induced Permanent Electrical Conductivity and Nanostructures in Polymersp. 187
Photoablation and Surface Modification of Polymers with the Excimer Laser Radiationp. 201
Process of Generating 3d-Microstructures with Excimer Lasersp. 221
Non-Coherent Structure Formation on UV-Laser Irradiated Polymersp. 237
An Innovative High Repetition Rate Shot Per Shot Acquisition System and its Application to a New Kind of Tropospheric LIDAR Measurementsp. 245
Detection of Heavy Metals in Environmental Samples Using Laser Spark Analysisp. 269
Applications of Excimer Laser Based Remote Sensing Systems to Problems Related to Water Pollutionp. 289
Applications of Lasers in Microelectronics and Micromechanicsp. 307
Excimer Laser for in situ Processing in Microelectronicsp. 319
Soft X-ray Radiation from Excimer-Driven Laser-plasma Sources: Application to Submicron Lithographyp. 339
Excimer Laser Beam Interaction with Metals and Ceramics Part I: Fundamental Aspectsp. 355
Excimer Laser Beam Interaction with Metals and Ceramics Part II: Materials Aspects and Applicationsp. 371
Pulsed Excimer Laser Crystallization and Doping for the Fabrication of Poly-Si and SiGe TFTsp. 387
Excimer Laser Surface Treatment of a S.G. Cast Iron: Possible Application for the Running-in Part of the Automotive Motorsp. 403
Transient Structural Modifications of Sintered Commercial Aluminum Nitride Ceramics Resulting from Low Fluence Excimer Laser Irradiationp. 411
How to Implement New Technology on a Production Line: Via-Hole Drilling with KrF-Laser as an Examplep. 417
Coronary Angioplasty with Excimer Laserp. 437
Corneal Optical Zone Reshaping with Excimer Laserp. 447
Laser Induced Fluorescence as a Tool for Atherosclerotic Tissue Characterization During Excimer Laser Aided Ablationp. 465
List of participantsp. 489
Indexp. 493
Table of Contents provided by Blackwell. All Rights Reserved.

ISBN: 9780792328193
ISBN-10: 0792328191
Audience: Professional
Format: Hardcover
Language: English
Number Of Pages: 496
Published: 30th April 1994
Publisher: Springer
Country of Publication: NL
Dimensions (cm): 24.77 x 17.15  x 3.18
Weight (kg): 1.0