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Electron-Beam Interactions with Solids : Application of the Monte Carlo Method to Electron Scattering Problems - Maurizio Dapor

Electron-Beam Interactions with Solids

Application of the Monte Carlo Method to Electron Scattering Problems

Hardcover Published: 23rd April 2003
ISBN: 9783540006527
Number Of Pages: 110

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The interaction of electron beams with solid targets has been studied since the early part of the last century. Present interest is spurred on by the fundamental role played by the electron-solid interaction in - among other areas - scanning electron microscopy, electron-probe microanalysis and Auger electron spectroscopy. This book aims to investigate selected aspects of the interaction of electrons with matter (backscattering coefficient for bulk targets, absorption, backscattering and transmission for supported and unsupported thin films, implantation profiles, secondary electron emission and so on); to study the probabilistic laws of interaction of the individual electrons with the atoms (elastic and inelastic cross sections); to introduce the Monte Carlo method and its use for computing the macroscopic characteristics of the interaction processes. Each chapter compares theory, simulations and experimental data.

Introductionp. 1
Motivationp. 1
Backscattered Particlesp. 2
Secondary Electronsp. 2
Depth Distribution of Trapped Particlesp. 2
From the Dirac Equation to the Monte Carlo Simulationp. 3
Referencesp. 4
The Spin of the Electronp. 5
The Spectrum of Angular Momentump. 5
The Spin of the Electronp. 7
The Dirac Equationp. 9
The Solution for Free Particlesp. 11
The Dirac Equation in a Central Potentialp. 13
Referencesp. 16
Elastic Scatteringp. 17
The First Born Approximationp. 17
The Density Matrix and Spin Polarisationp. 22
Relativistic Partial-Wave Expansionp. 25
Calculation of the Phase Shiftsp. 34
Exchange and Solid State Effectsp. 37
Comparing Theory and Experimental Datap. 37
Referencesp. 41
Inelastic Scatteringp. 43
The Classical Theoryp. 43
Dielectric Function and Stopping Powerp. 45
Inelastic Mean Free Pathp. 46
Positronsp. 47
Plasma Oscillationsp. 47
Comparing Theory and Experimental Datap. 48
Referencesp. 52
Electrons Impinging on Solid Targetsp. 53
Backscattered Electronsp. 53
Electrons in thin filmsp. 56
Definitions, Symbols, Propertiesp. 56
Unsupported thin filmsp. 58
Supported thin filmsp. 59
Secondary Electronsp. 61
Comparing Theory and Experimental Datap. 65
Referencesp. 68
Monte Carlo Simulationsp. 69
The Monte Carlo Methodp. 69
Random Variablesp. 70
Random Variable Uniformly Distributed in the Interval (0, 1)p. 71
Random Variable Distributed in a Given Interval with a Given Probabilityp. 71
Random Variable Uniformly Distributed in the Interval (a, b)p. 72
Random Variable with Poisson Distributionp. 72
Pseudo-Random-Number Generatorsp. 73
A Simple Monte Carlo Schemep. 73
A More Sophisticated Simulationp. 76
Surface Filmsp. 77
Another Monte Carlo Schemep. 78
Angular Deflection in Electron-Electron Collisionsp. 79
Secondary Electronsp. 80
Comparing Theory and Experimental Datap. 81
Referencesp. 90
Matrices and Operatorsp. 91
Representation of Linear Operatorsp. 91
Matrix Transformationsp. 91
Commuting Operatorsp. 93
The Dirac Notationp. 95
Ket and Bra Vectorsp. 95
Continuous Spectrump. 96
The Schrodinger Equation in the Dirac Notationp. 98
Special Functionsp. 99
Legendre Polynomials and Associated Legendre Functionsp. 99
Bessel Functionsp. 100
The Spherical Harmonicsp. 102
Indexp. 105
Table of Contents provided by Rittenhouse. All Rights Reserved.

ISBN: 9783540006527
ISBN-10: 3540006524
Series: Springer Tracts in Modern Physics
Audience: Professional
Format: Hardcover
Language: English
Number Of Pages: 110
Published: 23rd April 2003
Publisher: Springer-Verlag Berlin and Heidelberg Gmbh & Co. Kg
Country of Publication: DE
Dimensions (cm): 23.6 x 15.6  x 0.76
Weight (kg): 0.78