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Electromechanical Systems in Microtechnology and Mechatronics : Electrical, Mechanical and Acoustic Networks, their Interactions and Applications - Rudiger Ballas

Electromechanical Systems in Microtechnology and Mechatronics

Electrical, Mechanical and Acoustic Networks, their Interactions and Applications

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Published: 30th August 2010
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Electromechanical systems consisting of electrical, mechanical and acoustic subsystems are of special importance in various technical fields, e.g. precision device engineering, sensor and actuator technology, electroacoustics and medical engineering. Based on a circuit-oriented representation, providing readers with a descriptive engineering design method for these systems is the goal of this textbook. It offers an easy and fast introduction to mechanical, acoustic, fluid, thermal and hydraulic problems through the application of circuit-oriented basic knowledge. The network description methodology, presented in detail, is extended to finite network elements and combined with the finite element method (FEM): the combination of the advantages of both description methods results in novel approaches, especially in the higher frequency range. The book offers numerous current examples of both the design of sensors and actuators and that of direct coupled sensor-actuator systems. The appendix provides more extensive fundamentals for signal description, as well as a compilation of important material characteristics. The textbook is suitable both for graduate students and for engineers working in the fields of electrical engineering, information technology, mechatronics, microtechnology, and mechanical and medical engineering.

List of Symbolsp. xv
Focus of the Book
Introductionp. 3
Focus of the Bookp. 4
Fields of Application and Examples for Electromechanical Systemsp. 6
Design of Electromechanical Systemsp. 9
Simulation Methods for Electromechanical Systemsp. 10
Historical Overviewp. 10
Design Methodsp. 13
Electromechanical Networks and Interactionsp. 15
Signal Description and Signal Transmission in Linear Networksp. 16
The Circular Function as Basic Module for Time Functions of Linear Networksp. 16
Fourier Expansion of Time Functionsp. 20
The Fourier Transformp. 25
The Laplace Transformp. 33
Electrical Networksp. 36
Mechanical Networksp. 40
Interactionsp. 44
Mechanical Interactionsp. 44
Electromechanical Interactionsp. 46
Structured Network Representation of Linear Dynamic Systemsp. 56
Basic Equations of Linear Networksp. 58
Network Representation of Systems with Lumped and Distributed Parameters
Mechanical and Acoustic Networks with Lumped Parametersp. 61
Mechanical Networks for Translational Motionsp. 62
Arrangementsp. 62
Coordinatesp. 64
Componentsp. 66
Rules of Interconnectionp. 74
Isomorphism between Mechanical and Electrical Circuitsp. 77
Representation of Transient Characteristics of Mass Point Systems in the Frequency Domain (BODE diagram)p. 79
Network Representation of Mass Point Systemsp. 85
Sample Applicationsp. 88
Mechanical Networks for Rotational Motionsp. 99
Coordinatesp. 100
Components and System Equationsp. 101
Isomorphism between Mechanical and Electrical Circuitsp. 102
Sample Application for a Rotational Networkp. 106
Acoustic Networksp. 107
Coordinatesp. 108
Acoustic Componentsp. 109
Network Representation of Acoustic Systemsp. 110
Real Acoustic Componentsp. 114
Isomorphism between Acoustic and Electrical Circuitsp. 120
Sample Applicationsp. 120
Abstract Linear Networkp. 129
Coordinatesp. 129
Componentsp. 130
Nodal and Loop Rulesp. 132
Characteristics of the Abstract Linear Networkp. 132
Mechanical Transducersp. 137
Translational-Rotational Transducerp. 137
Rigid Rodp. 137
Bending Rodp. 141
Mechanical-Acoustic Transducerp. 146
Ideal and Real Mechanical-Acoustic Piston Transducersp. 147
General Elastomechanical-Acoustic Plate Transducerp. 149
Characteristics of Selected Mechanical-Acoustic Transducersp. 155
Mechanical and Acoustic Networks with Distributed Parametersp. 165
Representation of Mechanical Systems as one-dimensional Waveguidesp. 165
Extensional Waves within a Rodp. 166
Approximate Calculation of the Input Impedancep. 172
Approximate Representation of an Impedance at Resonancep. 177
Approximated two-port Network Representation at Resonancep. 178
Flexural Vibrations within a Rodp. 183
Network Representation of Acoustic Systems as Linear Waveguidesp. 192
Modeling of Transducer Structures with Finite Network Elementsp. 195
Ultrasonic Microactuator with Capacitive Diaphragm Transducerp. 195
Fluid-filled Pressure Transmission System of a Differential Pressure Sensorp. 198
Combined Simulation with Network and Finite Element Methodsp. 202
Applied Combination of Network Methods and Finite Element Methodsp. 204
Combined Simulation using the Example of a Dipole Bass Loudspeakerp. 209
Combined Simulation using the Example of a Microphone with Thin Acoustic Damping Fabricp. 216
Electromechanical Transducers
Electromechanical Interactionsp. 229
Classification of Electromechanical Interactionsp. 229
Network Representation of Electromechanical Interactionsp. 233
Magnetic Transducersp. 247
Electrodynamic Transducerp. 247
Derivation of the Two-Port Transducer Networkp. 247
Sample Applicationsp. 251
Electromagnetic Transducerp. 267
Derivation of the Two-Port Transducer Networkp. 268
Sample Applicationsp. 275
Piezomagnetic Transducerp. 285
Derivation of the Two-Port Transducer Networkp. 286
Sample Applicationsp. 296
Piezomagnetic Unimorph Bending Elementsp. 302
Example of a Parametric Magnetoelastic Bending Sensorp. 308
Electrical Transducersp. 313
Electrostatic Transducerp. 313
Electrostatic Plate Transducerp. 313
Sample Applicationsp. 323
Electrostatic Diaphragm Transducerp. 331
Sample Applicationsp. 334
Electrostatic Solid Body Transducersp. 339
Sample Applicationp. 341
Piezoelectric Transducers with Lumped Parametersp. 345
Model Representation of the Piezoelectric Effectp. 345
Piezoelectric Equations of State and Circuit Diagram for Longitudinal Couplingp. 348
General Piezoelectric Equations of Statep. 350
Piezoelectric Transducers and Corresponding Equivalent Parametersp. 353
Piezoelectric Bending Bimorph Elementsp. 358
Piezoelectric Materialsp. 360
Sample Applicationsp. 365
Piezoelectric Transducer as one-dimensional Waveguidep. 370
Transition form Lumped Parameters to the Waveguide using the Example of an Accelerometerp. 371
Piezoelectric Longitudinal Oscillator as Waveguidep. 375
Piezoelectric Thickness Oscillator as Waveguidep. 375
Sample Applications of Piezoelectric Longitudinal and Thickness Oscillatorsp. 381
Piezoelectric Beam Bending Element as Waveguidep. 392
Sample Applications of Piezoelectric Beam Bending Elementsp. 393
Reciprocity in Linear Networksp. 413
Reciprocity Relations in Networks with only One Physical Structurep. 413
Reciprocity Relations in General Linear Two-Port Networksp. 415
Electromechanical Transducersp. 417
Mechanical-Acoustic Transducersp. 420
Appendix
Characteristics of Selected Materialsp. 425
Material Characteristics of Crystalline Quartzp. 425
Piezoelectric Constants of Sensor Materialsp. 426
Characteristics of Metallic Structural Materialsp. 427
Material Characteristics of Silicon and Passivation Layersp. 428
Comparison of Main Characteristics of Silicon, Silicon Dioxide and Silicon Nitride Layersp. 428
Characteristics of Silicon Dioxide Layersp. 429
Characteristics of Silicon Nitride Layersp. 430
Characteristics of Ceramic Structural Materialsp. 431
Material Characteristics of Selected Polymersp. 432
Characteristics of Plastics as Structural Materialsp. 433
Composition and Material Characteristics of Selected Glassesp. 434
Material Characteristics of Metallic Solders and Glass Soldersp. 435
Sound Velocity and Characteristic Impedancep. 436
Signal Description and Transfer within Linear Networksp. 437
Fourier Expansion of Time Functionsp. 437
Estimate of Approximation Error with Numerical Analyses of Fourier Seriesp. 437
Sample Application for the Periodic Iteration of Singular Processesp. 440
Ideal Impulse and Step Functionsp. 442
Problem Definitionp. 442
Ideal Impulses and their System Responsep. 443
The Ideal Step Function and its System Responsep. 448
The Convolution Integralp. 449
Referencesp. 453
Indexp. 459
Table of Contents provided by Ingram. All Rights Reserved.

ISBN: 9783642108051
ISBN-10: 3642108059
Series: Microtechnology and MEMS
Audience: Professional
Format: Hardcover
Language: English
Number Of Pages: 472
Published: 30th August 2010
Publisher: Springer-Verlag Berlin and Heidelberg Gmbh & Co. Kg
Country of Publication: DE
Dimensions (cm): 23.5 x 15.5  x 2.54
Weight (kg): 0.9