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Electrical Characterization of Silicon-On-Insulator Materials and Devices : The Springer International Engineering and Computer Science - Sorin Cristoloveanu

Electrical Characterization of Silicon-On-Insulator Materials and Devices

The Springer International Engineering and Computer Science

Hardcover Published: 30th June 1995
ISBN: 9780792395485
Number Of Pages: 381

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Silicon on Insulator is more than a technology, more than a job, and more than a venture in microelectronics; it is something different and refreshing in device physics. This book recalls the activity and enthu­ siasm of our SOl groups. Many contributing students have since then disappeared from the SOl horizon. Some of them believed that SOl was the great love of their scientific lives; others just considered SOl as a fantastic LEGO game for adults. We thank them all for kindly letting us imagine that we were guiding them. This book was very necessary to many people. SOl engineers will certainly be happy: indeed, if the performance of their SOl components is not always outstanding, they can now safely incriminate the relations given in the book rather than their process. Martine, Gunter, and Y. S. Chang can contemplate at last the amount of work they did with the figures. Our SOl accomplices already know how much we borrowed from their expertise and would find it indecent to have their detailed contri­ butions listed. Jean-Pierre and Dimitris incited the book, while sharing their experience in the reliability of floating bodies. Our families and friends now realize the SOl capability of dielectrically isolating us for about two years in a BOX. Our kids encouraged us to start writing. Our wives definitely gave us the courage to stop writing. They had a hard time fighting the symptoms of a rapidly developing SOl allergy.

Preface
Introductionp. 1
Methods of Forming SOI Wafersp. 7
SOI Devicesp. 45
Wafer-Screening Techniquesp. 87
Transport Measurementsp. 119
SIS Capacitor-Based Characterization Techniquesp. 145
Diode Measurementsp. 185
MOS Transistor Characteristicsp. 209
Transistor-Based Characterization Techniquesp. 275
Monitoring Transistor Degradationp. 337
List of Symbolsp. 375
Indexp. 379
Table of Contents provided by Blackwell. All Rights Reserved.

ISBN: 9780792395485
ISBN-10: 0792395484
Series: The Springer International Engineering and Computer Science
Audience: General
Format: Hardcover
Language: English
Number Of Pages: 381
Published: 30th June 1995
Publisher: SPRINGER VERLAG GMBH
Country of Publication: US
Dimensions (cm): 23.39 x 15.6  x 2.24
Weight (kg): 0.74

Earn 836 Qantas Points
on this Book