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Bringing Scanning Probe Microscopy up to Speed : Microsystems Series - Stephen C. Minne

Bringing Scanning Probe Microscopy up to Speed

Microsystems Series

Hardcover

Published: 28th February 1999
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Bringing Scanning Probe Microscopy Up to Speed introduces the principles of scanning probe systems with particular emphasis on techniques for increasing speed. The authors include useful information on the characteristics and limitations of current state-of-the-art machines as well as the properties of the systems that will follow in the future. The basic approach is two-fold. First, fast scanning systems for single probes are treated and, second, systems with multiple probes operating in parallel are presented.
The key components of the SPM are the mechanical microcantilever with integrated tip and the systems used to measure its deflection. In essence, the entire apparatus is devoted to moving the tip over a surface with a well-controlled force. The mechanical response of the actuator that governs the force is of the utmost importance since it determines the scanning speed. The mechanical response relates directly to the size of the actuator; smaller is faster. Traditional scanning probe microscopes rely on piezoelectric tubes of centimeter size to move the probe. In future scanning probe systems, the large actuators will be replaced with cantilevers where the actuators are integrated on the beam. These will be combined in arrays of multiple cantilevers with MEMS as the key technology for the fabrication process.

`The presentation is clear and easy to follow, written by hands-on persons. There is a wealth of technical detail and useful diagrams. ...for persons who are serious fabricators of SPM...it is essential reading.' The Physicist, 37:2 (2000)

Introduction
Preface
Improving Convention Scanning Probe Microscopes
Design of Piezoresistive Cantilevers with Integrated Actuators
Increasing the Speed of Imaging
Cantilevers with Interdigital Deflection Sensors
Operation of the Interdigital Cantilever
Cantilever Arrays
Scanning Probes for Information Storage and Retrieval
Silicon Process Flow: ZnO Actuator and Piezoresistive Sensor
Silicon Process Flow: Interdigital Cantilever
Table of Contents provided by Publisher. All Rights Reserved.

ISBN: 9780792384663
ISBN-10: 0792384660
Series: Microsystems Series
Audience: Professional
Format: Hardcover
Language: English
Number Of Pages: 159
Published: 28th February 1999
Publisher: Springer
Country of Publication: NL
Dimensions (cm): 16.51 x 26.04  x 1.91
Weight (kg): 0.43