An Introduction to Surface-Micromachining provides for the first time a unified view of surface-micromachining. Building up from the basic building block of microfabrication techniques, to the general surface-micromachining design, it will finish with the theory and design of concrete components. An Introduction to Surface-Micromachining connects the manufacturing process, microscale phenomena, and design data to physical form and function.
This book will be of interest to mechanical engineers looking to scale down into micromachining and microelectronics designers looking to move horizontally to micromachining.
|Microfabrication processes||p. 9|
|Micromachining technologies||p. 29|
|Microscale physics||p. 45|
|Design rules||p. 75|
|Non-ideal processes||p. 81|
|Design techniques||p. 93|
|Electrical components||p. 103|
|Mechanical components||p. 115|
|Electrostatic actuators||p. 135|
|Electro-thermal-compliant actuators||p. 153|
|Raised structures||p. 165|
|Polymumps process||p. 177|
|Summit process||p. 181|
|Music process||p. 183|
|Table of Contents provided by Blackwell. All Rights Reserved.|
Series: Information Technology: Transmission, Processing & Storage
Number Of Pages: 189
Published: 3rd June 2004
Publisher: Springer-Verlag New York Inc.
Country of Publication: US
Dimensions (cm): 23.5 x 15.5 x 1.91
Weight (kg): 1.04