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An Introduction to Surface-Micromachining : Information Technology: Transmission, Processing & Storage - Robert William Johnstone

An Introduction to Surface-Micromachining

Information Technology: Transmission, Processing & Storage

Hardcover Published: 3rd June 2004
ISBN: 9781402080203
Number Of Pages: 189

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An Introduction to Surface-Micromachining provides for the first time a unified view of surface-micromachining. Building up from the basic building block of microfabrication techniques, to the general surface-micromachining design, it will finish with the theory and design of concrete components. An Introduction to Surface-Micromachining connects the manufacturing process, microscale phenomena, and design data to physical form and function.
This book will be of interest to mechanical engineers looking to scale down into micromachining and microelectronics designers looking to move horizontally to micromachining.

Introductionp. 1
Microfabrication processesp. 9
Micromachining technologiesp. 29
Microscale physicsp. 45
Mechanicsp. 63
Design rulesp. 75
Non-ideal processesp. 81
Design techniquesp. 93
Electrical componentsp. 103
Mechanical componentsp. 115
Electrostatic actuatorsp. 135
Electro-thermal-compliant actuatorsp. 153
Raised structuresp. 165
Polymumps processp. 177
Summit processp. 181
Music processp. 183
Table of Contents provided by Blackwell. All Rights Reserved.

ISBN: 9781402080203
ISBN-10: 1402080204
Series: Information Technology: Transmission, Processing & Storage
Audience: Professional
Format: Hardcover
Language: English
Number Of Pages: 189
Published: 3rd June 2004
Publisher: Springer-Verlag New York Inc.
Country of Publication: US
Dimensions (cm): 23.5 x 15.5  x 1.91
Weight (kg): 1.04