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An Introduction to Microelectromechanical Systems Engineering : Microelectromechanical Systems S. - Nadim Maluf

An Introduction to Microelectromechanical Systems Engineering

Microelectromechanical Systems S.

Hardcover

Published: 30th June 2004
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MEMS (microelectromechanical systems) technology makes possible the production of miniature devices and systems that stand to revolutionize industrial, optical, medical and electronic markets. Thousands of practitioners and students have gained a solid understanding of MEMS with the best-selling first edition of this book. Now in its second edition, An Introduction to Microelectromechanical Systems Engineering brings readers to up-to-date with the latest developments in this cutting-edge area. Featuring brand new coverage of today's hottest topics, such as RF MEMS and photonic MEMS, this thoroughly revised resource shows engineers, technical managers, and executives how their projects may benefit from a MEMS solution.

MEMS: A Technology from Lilliput
The Sandbox: Materials for MEMS
The Toolbox: Processes for Micromachining
MEM Structure and Systems in Industrial and Automotive Applications
Optical MEM Structures and Systems
MEM Structures and Systems for Medical Applications
MEM Structures and Systems for Electronic Applications
Packaging & Reliability for MEMS
Glossary
Table of Contents provided by Publisher. All Rights Reserved.

ISBN: 9781580535908
ISBN-10: 1580535909
Series: Microelectromechanical Systems S.
Audience: Professional
Format: Hardcover
Language: English
Number Of Pages: 304
Published: 30th June 2004
Publisher: Artech House Publishers
Country of Publication: US
Dimensions (cm): 25.4 x 17.8  x 1.7
Weight (kg): 0.83
Edition Number: 2
Edition Type: Revised