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Advanced Technologies Based on Wave and Beam Generated Plasmas : NATO Asi Series. Partnership Sub-Series 3, High Technology, Vol. 67. - H. Schluter

Advanced Technologies Based on Wave and Beam Generated Plasmas

NATO Asi Series. Partnership Sub-Series 3, High Technology, Vol. 67.

By: H. Schluter (Editor), A. Shivarova (Editor)

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Published: 28th February 1999
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This text draws together three areas of work on plasma technologies: advanced efforts based on wave generated, high frequency plasmas, plasma assisted ion implantation, and electron beam generated plasma. It encompasses all the links in the progress from fundamentals to applications, the description and modelling of different plasma sources to technological use, from general diagnostics to methods related to technological control and operation of plasma reactors. The book lays a foundation for the application of sources in industry (in high-tech electronics, microelectronics, IC fabrication, plasma chemistry, lighting, new materials, optics, the biomedical industry, and aerospace), and in astrophysics, atomic physics, laser physics, accelerator physics and microwave devices.

Preface
Acknowledgements
Plasma Discharges for Materials Processing and Display Applicationsp. 1
The Development and Use of Surface-Wave Sustained Discharges for Applicationsp. 23
Electrodeless Gas Discharges for Lightingp. 65
Plasma Production above Multipolar Magnetic Field Structures: from DC Magnetrons to Distributed ECRp. 97
ECR Plasmas for Thin-Film Depositionp. 111
Deposition Properties and Applications of Carbon-Based Coatingsp. 123
Substrate Biasing during Plasma Processing: Interest, Methods and Limitationsp. 137
Ion Energy Distributionsp. 149
Dusty Plasmas: Fundamental Aspects and Industrial Applicationsp. 175
Plasma Based Ion Implantationp. 191
Waveguide Stationary and Nonstationary Discharges: Modelling and Experimentsp. 245
Nonuniformity Aspects in Modelling and Noncollisional Heating of HF Dischargesp. 271
Travelling Wave Discharges in Nitrogen: Modelling and Experimentp. 311
Atmospheric Pressure Discharges: Travelling Wave Plasma Sourcesp. 335
Modelling of Atmospheric Pressure Microwave Sustained Dischargesp. 343
Long Microwave Dischargesp. 353
Waves in Bounded Magnetized Plasmasp. 367
Electron Beam Generated Plasmas: Theory, Experiments, Applicationsp. 391
EBIT: An Electron Beam Source for the Production and Confinement of Highly Ionized Atomsp. 429
The Anisotropic Etching of Silicon in CF[subscript 4], CF[subscript 4] + H[subscript 2] and CF[subscript 4-x]Cl[subscript z] Plasmap. 469
CF[subscript 2] Production by CF[subscript 4] Electron Impact Dissociation in Gas Dischargep. 471
On Negative Ions Langmuir Probe Measurements in an Ar + 4% CF[subscript 4] Currentless Plasmap. 473
Plasma Treatment of Polymer Surfaces in Different Gasesp. 475
Plasma Treatment of Polymer Surfaces in Gas Mixturep. 477
Field Emission Characteristics of Thin MPCVD Diamond Filmsp. 479
Technological Method of Substratum Metallization by Plasma-Arc Depositionp. 481
Hydrodynamic and Electrical Characterization of Corona Discharge Plasma Reactorp. 483
Study by Mass Spectrometry and Gas Chromatography of Fluorocarbon Waste Destruction in a Low-Pressure Plasma Reactorp. 485
CARS Applied to Plasmas for NO-Reductionp. 487
Heating and Melting of the Dust Crystal in a RF Discharge. Non-Linear Analysisp. 489
Intense Plasma Pulses in Doping, Coating and Glazing the Surface of Solid Materialsp. 491
Monoatomic Ion Rich DECR Plasmas for Ion Implantation by Plasma Immersion Using a New High Voltage-High Current Pulse Generatorp. 493
Spatial Distribution and Kinetics of Negative Ions in Glow DC Discharge in Pure O[subscript 2] and H[subscript 2]p. 495
Diffusion and Wall Loss of Magnesium in Decaying Plasmap. 497
Diffusion and Depopulation of the Metastable Cd[superscript 3]P[subscript 0,2] States in Collisions with Neon Atomsp. 499
Non-Local Regime of Self-Consistency in Stationary Waveguided Dischargesp. 501
Symmetric Mode in a Planar Plasma Waveguide: Numerical Study of Nonlinear Effectsp. 503
Modulation Instabilities of Surface-Wave Sustained Dischargesp. 505
Correlation and Spectrum Analysis of Instabilities in Waveguided Dischargesp. 507
Pulsed Surface Wave Sustained Discharges: Modellingp. 509
Pulsed Discharges Produced by Surface Waves in 3-cm Wavelength Band in the Airp. 511
Pulsed Microwave Discharge in Nitrogen: Diagnostics and Modellingp. 513
The Turning Back and the Turning Forward of the Wave Number in Surface Wave Propagationp. 515
Experimental Indications for the Existence of Plasma Resonances in Surface Wave Dischargesp. 517
Test Surface Waves as a Diagnostics Tool for SWSDp. 519
Optical Spectroscopy Diagnostics of Waveguided Discharges in a Non-Stationary Regimep. 521
A New Passive Compensation Technique for Probes in Oscillating Electric Fieldsp. 523
Modelling of Radio Frequency Capacitively Coupled Plasma at Intermediate Pressuresp. 525
Two-Dimensional Mapping of the Electron Energy Distribution Functionp. 527
Modelling of the Equivalent Circuit of Inductively Coupled Plasma Sourcesp. 529
Optical Measurements of Gas Temperature in Microwave Discharge Plasmas in Hydrogenp. 531
Gas Temperature Influence on the Particle Kinetics in a Surface-Wave-Sustained Nitrogen Dischargep. 533
Excited Atoms and Charged Particles Axial Distributions in Argon Microwave Plasmas at Various Gas Pressuresp. 535
A Study of Excitation Mechanisms in Atmospheric Microwave Induced Argon Plasmasp. 537
2D Model for a Microwave Sustained Discharge in Nitrogen at Atmospheric Pressurep. 539
Influence of Ionization Effects on Drift-Dissipative Instabilityp. 541
Investigation of the Electron Distribution Functions in Low Pressure Electron Cyclotron Resonance Dischargesp. 543
Electromagnetic Waves in a Magnetized Plasma Columnp. 545
Magnetoplasmons Guided by a Gyrotropic Plasma Layer on a Metal Substratep. 549
Wave Propagation in a Free Gyrotropic Plasma Layerp. 553
Source of an Annular Controlled Radius Plasmap. 555
Beam-Plasma Instability Effects Supporting Capacitive Low Pressure RF Dischargesp. 557
Author Indexp. 559
Subject Indexp. 561
Table of Contents provided by Blackwell. All Rights Reserved.

ISBN: 9780792356424
ISBN-10: 079235642X
Series: NATO Asi Series. Partnership Sub-Series 3, High Technology, Vol. 67.
Audience: Professional
Format: Hardcover
Language: English
Number Of Pages: 569
Published: 28th February 1999
Publisher: Springer
Country of Publication: NL
Dimensions (cm): 25.4 x 17.78  x 4.45
Weight (kg): 1.04