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Advanced Silicon & Semiconducting Silicon-Alloy Based Materials & Devices - Johan F. Nijs

Advanced Silicon & Semiconducting Silicon-Alloy Based Materials & Devices

By: Johan F. Nijs (Editor)

Hardcover

Published: 1st January 1994
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One of the first books to cover advanced silicon-based technologies, Advanced Silicon and Semiconducting Silicon Alloy-Based Materials and Devices presents important directions for research into silicon, its alloy-based semiconducting devices, and its development in commercial applications. The first section deals with single/mono crystalline silicon, focusing on the effects of heavy doping; the structure and electronic properties of defects and their impact on devices; the MBE of silicon, silicon alloys, and metals; CVD techniques for silicon and silicon germanium; the material properties of silicon germanium strained layers; silicon germanium heterojunction bipolar applications; FETs, IR detectors, and resonant tunneling devices in silicon, silicon germanium, and d-doped silicon; and the fascinating properties of crystalline silicon carbide and its applications. The second section explores polycrystalline silicon. It examines large grain polysilicon substrates for solar cells; the properties, analysis, and modeling of polysilicon TFTs; the technology of polysilicon TFTs in LCD displays; and the use of polycrystalline silicon and its alloys in VLSI applications. With contributors from leading academic and industrial research centers, this book provides wide coverage of fabrication techniques, material properties, and device applications.

..."should at least become a recognized text..." N D Young, Semicond. Sci. Technol uld at least become a recognized text..." N D Young, Semicond. Sci. Technol

Preface
Introduction
Figure acknowledgments
Heavy Doping Effects in Siliconp. 3
Defects in Crystalline Siliconp. 35
Molecular Beam Epitaxy of Silicon, Silicon Alloys, and Metalsp. 103
Low Thermal Budget Chemical Vapour Deposition Techniques for Si and SiGep. 141
Materials Properties of (Strained) SiGe Layersp. 185
SiGe Heterojunction Bipolar Applicationsp. 215
Field-Effect Transistors, Infrared Detectors, and Resonant Tunneling Devices in Silicon/Silicon-Germanium and [delta]-Doped Siliconp. 251
Crystalline Silicon-Carbide and its Applicationsp. 283
Large Grain Polysilicon Substrates for Solar Cellsp. 323
Properties, Analysis and Modelling of Polysilicon TFTsp. 361
Application and Technology of Polysilicon Thin Film Transistors for Liquid Crystal Displaysp. 387
The Use of Polycrystalline Silicon and its Alloys in VLSI Applicationsp. 413
Biographical Detailsp. 447
Keyword Indexp. 457
Table of Contents provided by Blackwell. All Rights Reserved.

ISBN: 9780750302999
ISBN-10: 0750302992
Audience: General
Format: Hardcover
Language: English
Number Of Pages: 466
Published: 1st January 1994
Publisher: INST OF PHYSICS PUB
Country of Publication: GB
Dimensions (cm): 23.39 x 15.6  x 2.69
Weight (kg): 0.86
Edition Number: 1