1300 187 187
This book contains proposals to redesign the scanning electron microscope, so that it is more compatible with other charged particle beam instrumentation and analytical techniques commonly used in surface science research. It emphasizes the concepts underlying spectrometer designs in the scanning electron microscope, and spectrometers are discussed under one common framework so that their relative strengths and weaknesses can be more readily appreciated. This is done, for the most part, through simulations and derivations carried out by the author himself. The book is aimed at scientists, engineers and graduate students whose research area or study in some way involves the scanning electron microscope and/or charged particle spectrometers. It can be used both as an introduction to these subjects and as a guide to more advanced topics about scanning electron microscope redesign.
| Preface | p. vii |
| Conventional SEM Design | p. 1 |
| Introduction to the SEM | p. 2 |
| Basic principles of electron optics | p. 9 |
| The electron gun | p. 19 |
| Lens aberrations and primary beam probe size | p. 24 |
| Deflection systems | p. 36 |
| Quadrupole stigmators | p. 42 |
| SEM output signals | p. 48 |
| The emission hemisphere and BSE collection | p. 51 |
| The scattered electron energy distribution | p. 53 |
| The SE collection efficiency | p. 55 |
| Specimen charging | p. 59 |
| Elastic BSE imaging | p. 61 |
| Selected SEM image examples | p. 64 |
| Spectrometer Design Principles | p. 71 |
| Figures of merit | p. 72 |
| The SAM and the SEM | p. 76 |
| The retarding field analyzer | p. 78 |
| Deflection field analyzers | p. 83 |
| The parallel plate analyzer | p. 83 |
| The cylindrical mirror analyzer | p. 96 |
| Electric sector analyzers | p. 101 |
| Magnetic deflector analyzers | p. 113 |
| Wien filters | p. 124 |
| Magnetic collimation and time of flight spectrometers | p. 131 |
| In-lens Improvements | p. 135 |
| Magnetic immersion lenses | p. 135 |
| Magnetic semi-in-lens designs | p. 143 |
| Electric retarding field lenses | p. 156 |
| Mixed field in-lens designs | p. 164 |
| Selected in-lens image examples | p. 176 |
| Sub-nanometer Probe Diameters | p. 185 |
| Monochromators and immersion objective lenses | p. 185 |
| Aberration correctors | p. 198 |
| The helium ion microscope | p. 218 |
| Secondary Electron Spectrometers | p. 223 |
| Early deflection analyzers | p. 223 |
| Retarding field analyzers | p. 226 |
| Surface fields and signal-to-noise characteristics | p. 237 |
| Deflection/multi-channel analyzers | p. 244 |
| Full Range Deflector Spectrometer Designs | p. 263 |
| First-order focusing toroidal analyzers | p. 265 |
| A second-order focusing toroidal analyzer design | p. 270 |
| A modified fountain analyzer design | p. 281 |
| Full Range Parallel Energy Spectrometer Designs | p. 287 |
| The time-of-flight spectrometer | p. 290 |
| A Gaussian field magnetic sector | p. 293 |
| A round magnetic beam separator | p. 301 |
| Spectroscopic SEM Proposals | p. 319 |
| Field Expansions | p. 327 |
| Derivation of the Paraxial Equation | p. 337 |
| Spherical Aberration | p. 349 |
| Chromatic Aberration | p. 365 |
| Multipole Lenses | p. 375 |
| Bibliography | p. 385 |
| Index | p. 399 |
| Table of Contents provided by Ingram. All Rights Reserved. |
ISBN: 9789812836670
ISBN-10: 9812836675
Audience:
Tertiary; University or College
Format:
Hardcover
Language:
English
Number Of Pages: 400
Published: 3rd November 2010
Dimensions (cm): 23.5 x 16.2
x 2.9
Weight (kg): 0.726
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