By: Miko Elwenspoek (Editor), Hiroyuki Fujita (Editor), Stefan Johansson (Editor), Ernst Obermeier (Editor), Michael L. Reed (Editor)

Hardcover

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Materials research plays a central role in the development of microsystems in a number of different ways. More specifically, materials aspects are important issues for both the choice of fabrication method and the design of microcomponents and systems to obtain the desired functions. This book focuses on materials as they are used in microsystems for mechanics (i.e., mechanical sensors such as accelerometers and pressure sensors, and actuators such as micropumps and micromotors) and optics (i.e., optical microcomponents, couplers and switches). Often the materials used are thin films, with thicknesses ranging from fractions of a micrometer to tens of micrometers, and the properties of which usually strongly depend on the details of the deposition process. Researchers discuss this complex interplay between materials, design and fabrication processes. Topics range from exciting MEMS technologies and exotic materials such as diamond-like carbon and aluminum nitride, to various characterization and testing methods and fabrication techniques.

Preface
Materials Research Society Symposium Proceedings
Technology for Microassembling	p. 3
Hard Quasiamorphous Carbon - A Prospective Construction Material for Micro-Electro-Mechanical Systems	p. 15
Polymers for Optical-Communications Device Fabrication Optical Adhesives and Polyimide Waveguides	p. 27
Mechanical and Thermophysical Properties of Thin Film Materials for MEMS: Techniques and Devices	p. 39
Piezoelectric Force Sensing Pb(Zr,Ti)O[subscript 3] Microcantilever Array for Multiprobe Scanning Force Microscopy	p. 59
Selective Electroless Copper Metallization of Epoxy Substrates	p. 69
Design and Properties of a Thin-Film, MEMS-Based Magnetostrictive Magnetometer	p. 75
XRD and XTEM Investigation of Polycrystalline Silicon Carbide on Polycrystalline Silicon	p. 81
Improved Autoadhesion Measurement Method for Micromachined Polysilicon Beams	p. 87
Elastic Properties of Diamondlike Carbon Thin Films: A Brillouin Scattering Study	p. 93
Hardening of Nickel Alloys by Ion Implantation of Titanium and Carbon	p. 99
Patterned Sol-Gel Structures by Micro Molding in Capillaries	p. 105
Measurements of Residual Stresses in Low-Stress Silicon Nitride Thin Films Using Micro-Rotating Structures	p. 111
Thermal Conductivity of CVD-Diamond Films Between 80 and 700 K	p. 117
A Study of Hermetic Glass Sealing Using a Modified Direct Bonding Method	p. 123
Influence of the Structural Parameters of Polysilicon Films on the Piezoresistive Properties at High Temperature	p. 131
Effect of Thermoelastic Stress on the Pressure Response of a Composite SiO[subscript 2]/Si Membrane	p. 137
Fabrication Processes and Characteristics of Microelectromechanical System Using PZT Films	p. 143
Optical Waveguiding (Pb,La)(Zr,Ti)O[subscript 3] Thin Films Prepared by Pulsed Laser Deposition	p. 149
Pulsed laser Deposition and Acoustic Property of Piezoelectric/Nonpiezoelectric Multilayer Films	p. 155
Charge Trapping and Degradation Properties of PZT Thin Films for MEMS	p. 161
A Low Temperature Direct Bonding Method Using an Electron-Beam Evaporated Silicon-Oxide Interlayer	p. 167
Experimental Analysis of the Process of Anodic Bonding Using an Evaporated Glass Layer	p. 173
Micro-Raman Study of Stress Distribution and Thermal Relaxation of Oxidized Silicon Membranes	p. 179
A New Technique for Measuring Poisson's Ratio of MEMS Materials	p. 185
Photoconductivity in Vacuum Deposited Films of Silicon-Based Polymers	p. 191
Structural Characterization of p++ Si:B Layers for Bulk Micromachining	p. 197
Silicon Microhotplate Arrays as a Platform for Efficient Gas Sensing Thin Film Research	p. 203
Mechanical Behavior of a MEMS Acoustic Emission Sensor	p. 209
Characterization of the Piezoelectric Response of Aluminum Nitride Grown by DC Magnetron Sputtering for Applications in Thin-Film Resonators	p. 215
The Effect of Inorganic Thin Film Material Processing and Properties on Stress in Silicon Piezoresistive Pressure Sensors	p. 221
Titanium-Nickel Shape Memory Thin Film Actuators for Micromachined Valves	p. 227
Development of Micromirror Using Piezoelectric Excited and Actuated Structures	p. 233
Author Index	p. 239
Subject Index	p. 241
Table of Contents provided by Blackwell. All Rights Reserved.

ISBN: 9781558993488
ISBN-10: 1558993487
Series: MRS Proceedings
Audience: Professional
Format: Hardcover
Language: English
Number Of Pages: 242
Published: 30th March 1997
Publisher: Materials Research Society
Dimensions (cm): 23.0 x 15.6  x 1.8
Weight (kg): 0.499