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The evolution of thin-film and surface structure impacts significantly on a number of high-technology areas involving the electronics, electro-optics, magnetic data storage, petrochemical and polymer industries, among others. This volume draws together researchers working in the areas of surface structure, dynamics and growth characterization, to identify common interest areas and to promote interdisciplinary interaction. Topical emphasis is centered on the information content derived, rather than the specific materials involved.
| Preface | |
| Acknowledgments | |
| Materials Research Society Symposium Proceedings | |
| Surface Energy Driven Crystallization of Amorphous [actual symbol not reproducible] Alloy | p. 3 |
| Structure, Morphology and Evolution of Interfaces in Si/Si[subscript 1-x]Ge[subscript x] Superlattices | p. 9 |
| Surface Diffusion of Large Ag Clusters on Ag(100) | p. 15 |
| Atomic Force Microscopy and Raman Spectroscopy Study of Strain Relaxation in InGaAs on GaAs(100) Grown by Chemical Beam Epitaxy Using Unprecracked Monoethylarsine | p. 21 |
| Manipulation of Nucleation During Si Molecular Beam Epitaxy | p. 27 |
| Structural Evolution or Rapid Thermal Carbonized Si Surfaces | p. 33 |
| Pulsed Laser Deposition and Characterization of Novel Cu/TiN/Si(100) Heterostructures Grown Via Domain Epitaxy | p. 39 |
| Growth Morphology of Vicinal Hillocks on the {101} Face of KH[subscript 2]PO[subscript 4]: Evidence of Surface Diffusion | p. 45 |
| The Morphology of Cu Clusters on SrTiO[subscript 3](001) at Initial Stages of Metal Film Growth | p. 51 |
| Microstructural Evolution During the Epitaxial Growth of Ag/InP (100) | p. 59 |
| Structural Evolution of Highly Crosslinked Polymer Networks | p. 65 |
| Morphology of Thin Films | p. 71 |
| Nucleation and Growth of CVD Si Thin Films: AFM, SE and TEM Analysis | p. 77 |
| Probing the Nucleation of a Thin Metal Film: Atom Deposition Vs. Cluster Beam Deposition | p. 83 |
| Morphology and Step Coverage of In-Situ Doped Polysilicon Films Deposited by Single Wafer CVD | p. 89 |
| Microstructural Evolution of Ag/GaAs (110) | p. 95 |
| Growth Morphology of Ag Islands on GaAs (110) at Low Coverage: Monte Carlo Simulations | p. 101 |
| Patterns of Competitive Crystal Growth | p. 107 |
| A Dynamic View of Step Configurations on Ag(110) and Their Role in the Formation of Oxygen Overlayers | p. 115 |
| Epitaxial Growth of Metastable Sn[subscript x]Ge[subscript 1-x] Alloy Films by Ion-Assisted Molecular Beam Epitaxy | p. 123 |
| Morphology Maps of Small Particles | p. 135 |
| Structure of Nanophase Gold Particles on Iron Oxide Supports | p. 141 |
| Using Atomic Force Microscopy to Image Langmuir Blodgett Films of Disk Shaped Molecules | p. 147 |
| A Soft Incommensurate Reconstruction on Pb/Si(111) | p. 153 |
| Measuring Vacancy Diffusivity and Vacancy Assisted Clustering by Nitridation Enhanced Diffusion of Sb in Si(100) Doping Superlattices | p. 157 |
| Co[subscript 3]O[subscript 4] Epitaxial Formation on CoO(100) | p. 163 |
| Tetragonal Au-Ni (001) Solid Solutions Grown by MBE | p. 169 |
| Microstructure and Reconstruction of LaAlO[subscript 3] {100} and {110} Surfaces | p. 175 |
| Atomic Imaging of Metal-Semiconductor Surfaces Using UHV-HREM and Diffraction | p. 181 |
| Nanofabrication of Materials with a Scanning Tunneling Microscope | p. 191 |
| Surface and Defect Structure of Epitaxial Gallium Phosphide on Si(001) | p. 197 |
| Step-Step Interactions on the Vicinal Ge(001) Surface | p. 203 |
| Characterization of Sputtered Cerium Dioxide Thin Films | p. 209 |
| Crystalline Perfection of Semiconductor Surfaces by X-Ray Multiple Diffraction | p. 215 |
| SFM Studies of the Surface Morphology of Ice | p. 221 |
| Molecular Dynamics Study of Disordering and Premelting of the Pb(110) Surface | p. 227 |
| Role of Surface Steps in Thin Film Growth and Properties Studied by Leem | p. 235 |
| In-Situ Scanning Probe Microscopy of Solid-Liquid Interfaces: Role of Epitaxial Oxide Adlayers on Cu Electrodeposition | p. 247 |
| Probing Biopolymer Films with Scanning Force Methods | p. 253 |
| Reconstruction from an Oxidized Si(111) Surface Studied by High-Temperature STM | p. 259 |
| Monte Carlo Simulation of a Growing Pb-Film on Cu (100) and (111) Surfaces | p. 263 |
| Interface Morphology of RF-Sputtered Nb/Al[subscript 2]O[subscript 3] Multilayers Studied by X-Ray Reflectivity and Diffuse Scattering | p. 269 |
| Structure of the Annealed Au-Si(100) System: A UHV-HREM Study | p. 275 |
| Atomic Structure of Ultrathin Erbium Silicides on Si(111) | p. 281 |
| Ambient and High Temperature STM Investigations of the Growth of Titanium Silicide on Silicon Substrates | p. 287 |
| Structural Characterization of Ga on Si(112) by Auger Electron Diffraction | p. 293 |
| Roughness Analysis of Si[subscript 1-x]Ge[subscript x] Films | p. 301 |
| Magnetic Force Microscopy: Recent Advances and Applications | p. 311 |
| Step Coverage and Material Properties of CVD Titanium Nitride Films from TDMAT and TDEAT Organic Precursors | p. 323 |
| Validation of the Modelling of a Solid-Liquid Reaction by a Solid-Vapor Reaction | p. 329 |
| Orientation Selection and Microstructural Evolution of Epitaxial Pt Films on (001) MgO | p. 335 |
| Comparison of Properties of CVD Copper Films Deposited on Different Substrate Materials | p. 341 |
| Preferred Orientation and Magnetic Properties of Barium Hexaferrite Thin Films Devitrified from the Glass | p. 347 |
| Evaluation of Surface Characteristics of ZnS and Zn[subscript 2]SiO[subscript 4] Powders by SFM | p. 353 |
| A Comparison of the Physical Properties of Cluster-Based and Vacuum-Evaporated Thin Metal Films | p. 359 |
| Evolution of Microstructure During Low-Temperature Solid Phase Epitaxial Growth of Si[subscript x]Ge[subscript 1-x] on Si(001) | p. 365 |
| Spectral Sensitivities of X-Ray Diffraction and Atomic Force Microscopy to the Roughness of Si/SiO[subscript 2] Interfaces | p. 373 |
| Surface Roughness Investigation of Thin SiO[subscript 2] Films Deposited from N[subscript 2]O and SiH[subscript 4] | p. 377 |
| Wear Resistance of Pearlitic Steel Microstructures | p. 383 |
| Surface Roughness and Specific Contact Resistance of AuGeNi/InP Ohmic Contacts | p. 389 |
| Dynamic Surface Evolution of Sputtered Cu-Coatings: A Quantification of Surface Diffusion Effects by AFM | p. 395 |
| Study of Surface Structure, Morphology and Hardness of Several Different Diamond-Like Carbon Films | p. 401 |
| Dissolution of CaCO[subscript 3](1014) Surface | p. 409 |
| Tungsten Silicide Stability and Interface Reaction Determined by Modeling and Experiments | p. 415 |
| A Model for Oxide Film Evolution on Alloys and Prediction of Resulting Layer Structure | p. 421 |
| Phase Transformations in a-Si/Ni/c-Si Structures with Different Interfacial Ni Layer Thicknesses | p. 427 |
| An HREM Study of the Microstructure of A1 Contact on GaN/AlN/SiC Thin Films | p. 433 |
| Comparison of Amorphous and Polycrystalline Tungsten Nitride Diffusion Barrier for MOCVD-Cu Metallization | p. 441 |
| Characterization and Annealing of Sputtered AlN Films for Piezoelectric Resonators | p. 447 |
| Mechanism of Facet Formation During Epitaxial CoSi[subscript 2] Growth Using Co/Refractory Bilayers | p. 453 |
| Amorphous Ti-Si-N Barrier Metal for Cu Metallization on ULSIs | p. 459 |
| Epitaxial TiSi[subscript 2] Growth on Si(100) from Reactive Sputtered TiN[subscript x] and Subsequent Annealing | p. 465 |
| Microstructure and Interfacial Reactions in RuO[subscript 2]/Ta[subscript 2]N Precision Thin Film Resistors | p. 471 |
| High Resolution Microscopy of Pd/InP Interfaces | p. 477 |
| Characterization of Tantalum Oxide Thin Film and Its Electrodes for DRAM's Capacitor Application | p. 483 |
| Microstructures of Tungsten Silicide Films Deposited by CVD and by Sputtering | p. 491 |
| Structural-Chemical Properties of InP Own Oxides | p. 497 |
| Condition of Interface: Anodic Oxide - A[superscript 3]B[superscript 3] Semiconductor | p. 503 |
| Surface Structure and Morphology of CdS Thin Films Deposited by Spray Pyrolysis | p. 507 |
| Epitaxial Formation and Characterization of CeO[subscript 2] Films | p. 513 |
| XPS Study of Sub-Monolayer Native Oxide on HF-Treated Si Surfaces | p. 519 |
| Characterization of the Degradation Processes in the Buried Heterostructure Quantum Well Laser Diodes Using Internal Second Harmonic Emission | p. 525 |
| Surface Alloy Phases of Immiscible Metals: A Semiempirical Study of Au Growth on Ni(110) | p. 531 |
| A Model for Low-Resistivity TiSi[subscript 2] Formation on Narrow Polysilicon Lines | p. 539 |
| Influence of Interface Roughness Scattering on Electron Mobility in GaAs-Al[subscript 0.3]Ga[subscript 0.7]As Two Dimensional Electron Gas (2DEG) Heterostructures | p. 545 |
| Ceramic Coatings in Pump Manufacturing | p. 551 |
| ZrO[subscript 2] and [actual symbol not reproducible] Phase Structure in Films and Powders | p. 557 |
| RF Aerosol Mist Plasma Deposition of Oxide Films | p. 563 |
| Elastic Misfit Strain Relaxation in Highly Strained InAs Dots on GaAs as Studied by TEM, AFM and VFF Atomistic Calculations | p. 569 |
| Modeling of Collimated Titanium Nitride Physical Vapor Deposition Using a Combined Specular-Diffuse Formulation | p. 575 |
| Very Low Temperature Deposition of Polycrystalline Silicon Films with Micro-Meter-Order Grains on SiO[subscript 2] | p. 581 |
| ZnO:In Thin Films Prepared with Different Precursor Salts by Spray Pyrolysis and Studied by Electron Microscopy | p. 587 |
| Capillary Instabilities in Cobalt Silicide Thin Films | p. 593 |
| Surface Topography of Cocondensed Amorphous ZrCo-Alloy Films Investigated in situ by UHV-STM | p. 601 |
| Grain Growth Behavior of Bismuth Titanate Thin Film on Metallic Silicon Substrates | p. 607 |
| Microstructure and Surface Morphology of Ag and Au Films Grown on Hydrogen-Terminated Si(111) Substrates | p. 613 |
| Structural Evolution of Highly Crosslinked Polymer Networks | p. 619 |
| Direct Sub-Lattice Imaging of Interface Dislocation Structures in CdTe/GaAs(001) | p. 625 |
| The Effect of Si on TiAl[subscript 3] Formation in Ti/Al Alloy Bilayers | p. 631 |
| Effects of Rapid Thermal Annealing on Heavily Boron Doped Silicon Epitaxial Layers | p. 637 |
| Computer Simulation of Surface Diffusion of Copper on Copper (111) and (100) Surfaces | p. 643 |
| Reduction of Defects in Highly Lattice Mismatched InGaAs Grown on GaAs by MOCVD | p. 649 |
| Defect-Free GaAs CAP Layer on Aluminum Oxide Generated by Thermal Oxidation of AlAs | p. 655 |
| Author Index | p. 661 |
| Subject Index | p. 665 |
| Table of Contents provided by Blackwell. All Rights Reserved. |
ISBN: 9781558992566
ISBN-10: 1558992561
Series: Materials Research Society Symposium Proceedings (Hardcover)
Audience:
Professional
Format:
Hardcover
Language:
English
Number Of Pages: 668
Published: 18th July 1995
Publisher: CAMBRIDGE UNIV PR
Dimensions (cm): 23.368 x 16.002
x 4.064
Weight (kg): 1.066
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