By: S. Carter (Editor), S. A. Chambers (Editor), R. Droopad (Editor), D. S. Ginley (Editor), Subhendu Guha (Editor)

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This book contains the proceedings of two symposia held at the 2002 MRS Fall Meeting in Boston. Papers from Symposium T, Crystalline Oxides on Semiconductors, bring together experts from different technology areas - high-k gate dielectrics, novel memories, and ferroelectrics, for example - to examine commonality among the fields. These papers offer an overview of the field, highlight interesting experimental results and device ideas, and feature innovative theoretical approaches to understanding these systems. Symposium V, Interfacial Issues for Oxide-Based Electronics, covers a wide range of topics involving the interfaces between electro-optical oxide layers and other materials. Overall, it is clear that a new generation of materials and heterostructures has been enabled by the increasing control of interfacial phenomena. Topics include: epitaxial oxide-silicon heterostructures; ferroelectric thin films on silicon; theory and modeling; crystalline oxides for gate dielectrics; transparent conducting oxides; transparent conducting oxides and oxide growth and properties; field effect devices and gate dielectrics; ferroelectrics, capacitors and sensors; organic devices and interfacial growth issues.

Preface: Symposium T	p. xiii
Preface: Symposium V	p. xv
Materials Research Society Symposium Proceedings	p. xvi
Symposium T
Epitaxial Oxide-Silicon Heterostructures I
Epitaxial Si Films Grown on Lattice Matched (La[subscript x]Y[subscript 1-x])O[subscript 3]/Si (111) Structures by Molecular Beam Epitaxy	p. 5
Role of the First Atomic Layers in Epitaxial Relationship and Interface Characteristics of SrTiO[subscript 3] Films on CeO[subscript 2]/YSZ/Si(001)	p. 9
Ferroelectric Thin Films on Silicon I
Sm Doping Effects on Electrical Properties of Sol-Gel Derived SrBi[subscript 2]Ta[subscript 2]O[subscript 9] Films	p. 17
MFIS and MFS Structures Using SrBi[subscript 2]Ta[subscript 2]O[subscript 9] Thin Films for the FRAM Applications	p. 23
Epitaxial Oxide-Silicon Heterostructures II
Progress in Epitaxial Oxides on Semiconductors	p. 31
Epitaxial Growth and Magnetic Behavior of (Ni,Zn)Fe[subscript 2]O[subscript 4] Thin Films on Si Substrate Using Designed Buffer Layers for Novel Memory Application	p. 43
Ferroelectric Thin Films on Silicon II
Growth, Structure, and Properties of Uniformly a-Axis Oriented Ferroelectric Bi[subscript 3.25]La[subscript 0.75]Ti[subscript 3]O[subscript 12] Thin Films on Si(100) Substrates	p. 51
Recent Progress in Ferroelectic-Gate FETs	p. 61
Integration Processes and Properties of One Transistor Memory Devices	p. 69
X-ray Photoelectron and UV Photoyield Spectroscopic Studies on Structural and Electronic Properties of Sr[subscript x]Bi[subscript y]Ta[subscript 2]O[subscript 9] Films	p. 75
Theory and Modeling
First Principles Modeling of High-k Dielectric Materials	p. 83
First-Principles Study of Electronic and Dielectric Properties of ZrO[subscript 2] and HfO[subscript 2]	p. 93
Atomic Structure, Band Offsets and Hydrogen in High-k Oxide: Silicon Interfaces	p. 99
Oxygen Vacancy Defects in Tantalum Pentoxide: A Density Functional Study	p. 113
Crystalline Oxides for Gate Dielectrics
High-k Gate Dielectrics for Si and Compound Semiconductors by Molecular Beam Epitaxy	p. 121
Physical and Electrical Characterization of Hafnium Silicate Thin Films	p. 133
Dynamic Growth Mechanism and Interface Structure of Crystalline Zirconia on Silicon	p. 139
The Influence of Defects on Compatibility and Yield of the HfO[subscript 2]-PolySilicon Gate Stack for CMOS Integration	p. 145
Crystalline Oxides for Gate Dielectrics II
Improvement of Capacitance-Voltage (C-V) Characteristics of YSZ/Si(001) and ZrO[subscript 2]/Si Thin Film by Nb-Doping	p. 153
A Study of Al[subscript 2]O[subscript 3]:C Films on Si(100) Grown by Low Pressure MOCVD	p. 159
Conduction Mechanisms in SrTiO[subscript 3] Thin Films on Silicon	p. 165
HRTEM Investigation of Effect of Various Rare Earth Oxide Dopants on Epitaxial Zirconia High-k Gate Dielectrics	p. 171
Structural Quality and Electrical Behavior of Epitaxial High-k Y[subscript 2]O[subscript 3]/Si(001)	p. 177
Study of Interface Formation of (Ba,Sr) TiO[subscript 3] Thin Films Grown by rf Sputter Deposition on Bare Si and Thermal SiO[subscript 2]/Si Substrates	p. 183
Symposium V
Transparent Conducting Oxides
The Behavior of Cyclic Voltammetry Stripping (CVs) With Tin-Doped Indium Oxide in 0.3M Hydrochloric Acid	p. 193
Electro-Structural and Film Growth Properties of Room-Temperature Deposited Indium-Tin-Oxide on Polymer Substrates	p. 201
Thin-Film Indium Oxide Doped With Refractory Metals	p. 207
An Angular Dependent X-ray Photoemission Study of Indium-Tin-Oxide Surfaces	p. 213
Transparent Conducting Oxides II and Oxides Growth and Properties
Wide-Gap P-Type Conductive Properties in Layered Oxychalcogenides	p. 223
X-ray Amorphous P-Type Conductive Oxide; ZnRh[subscript 2]O[subscript 4]	p. 235
Co-Doping Deposition of p-Type ZnO Thin Films Using KrF Excimer Laser Ablation	p. 241
Photo-Induced Insulator-Semiconductor Transition in 12CaO-7Al[subscript 2]O[subscript 3] (C12A7)	p. 247
Reactive Solid-Phase Epitaxy--A Novel Growth Method for Single-Crystalline Thin Films of Complex Oxides With Superlattice Structure	p. 257
Fabrication of MISFET Exhibiting Normally-Off Characteristics Using a Single-Crystalline InGaO[subscript 3](ZnO)[subscript 5] Thin Film	p. 267
Field Effect Devices and Gate Dielectrics
Materials Selection for SrTiO[subscript 3]-Based Epitaxial Oxide Field-Effect Devices	p. 275
Photoemission Study of Interfacial Oxidation in ZrO[subscript 2]/Subnanometer SiON[subscript x]/Si(100) Stacked Structures	p. 281
Ferroelectric Field Effect Device	p. 287
The Interactions Between SBT and Transition Metal Studied by DV-X[alpha] Method	p. 293
Ferroelectrics, Capacitors and Sensors
A Comparison of Tunneling Through Thin Oxide Layers on Step-Free and Normal Si Surfaces	p. 301
Recent Development of Al[subscript 2]O[subscript 3]-Based Gas-Sensing Materials	p. 307
Organic Devices
Stability of Indium Tin Oxide/Polymer Interfaces	p. 315
Interfacial Growth Issues
Experimental and Theoretical Studies of the Si(100)/SiO[subscript 2] Interface Formed by Wet and Dry Oxidation	p. 329
SiO[subscript 2] Formation at the Aluminum Oxide/Si(100) Interface	p. 335
Role of Ambience on the Diffusion of Charge Carriers in the TiO[subscript 2] Layers Investigated by the Photovoltage Technique	p. 341
A Structural Study of the Amorphous to Crystalline Transformation in In[subscript 2]O[subscript 3] Thin Films	p. 347
Engineering ZnO/GaN Interfaces for Tunneling Ohmic Contacts to GaN	p. 353
Heteroepitaxial Growth of a Wide Gap P-type Oxysulfide, LaCuOS	p. 359
Growth and Characteristics of Single Crystals of Lithium Niobate	p. 365
Author Index	p. 371
Subject Index	p. 375
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ISBN: 9781558996847
ISBN-10: 1558996842
Series: MRS Proceedings
Audience: General
Format: Hardcover
Language: English
Number Of Pages: 376
Published: 23rd June 2003
Publisher: Materials Research Society
Weight (kg): 1.0